TY - JOUR
T1 - Manufacturing pinhole arrays for X-ray source diagnostics using LIGA
AU - Gerner, M.
AU - Holldack, K.
AU - Luttge, R.
AU - Schmidt, M.
PY - 1998
Y1 - 1998
N2 - The manufacturing of pinhole arrays with diameters 10 µm up to 60 µm in 100-300 µm gold foils is described using LIGA. These structures are used to characterize the electron beam in a storage ring by means of the emitted synchrotron radiation. The source inside the bending magnet 13 at BESSY I (single bunch mode, 70 mA ring current, pinholes: Ø 60 µm) is (448 ± 40) µm in height and (768 ± 40)µm in horizontal width. For BESSY II pinholes with Ø 10-20 µm will be used utilizing bending magnet radiation (resolution ~ 10 µm), single pinholes with 1-5 µm in diameter are dedicated to insertion device characterization (coherence).
AB - The manufacturing of pinhole arrays with diameters 10 µm up to 60 µm in 100-300 µm gold foils is described using LIGA. These structures are used to characterize the electron beam in a storage ring by means of the emitted synchrotron radiation. The source inside the bending magnet 13 at BESSY I (single bunch mode, 70 mA ring current, pinholes: Ø 60 µm) is (448 ± 40) µm in height and (768 ± 40)µm in horizontal width. For BESSY II pinholes with Ø 10-20 µm will be used utilizing bending magnet radiation (resolution ~ 10 µm), single pinholes with 1-5 µm in diameter are dedicated to insertion device characterization (coherence).
U2 - 10.1007/s005420050127
DO - 10.1007/s005420050127
M3 - Article
SN - 0946-7076
VL - 4
SP - 184
EP - 186
JO - Microsystem Technologies
JF - Microsystem Technologies
IS - 4
ER -