Magnetic levitation systems compared to conventional bearing systems

A. T.A. Peijnenburg, J. P.M. Vermeulen, J. van Eijk

Research output: Contribution to journalArticleAcademicpeer-review

31 Citations (Scopus)

Abstract

So far, guide ways for positioning systems (stages) in semiconductor applications are often equipped with air bearings and/or roller bearings. Although these passive bearing systems are seemingly rather cost-effective, motion performance and motion capabilities are limited compared to active systems using multiple servo loops. So far, nm-level motion performance in 6 degrees of freedom (DoF) was realized through the application of an isolated machine architecture in combination with a hybrid stage concept, i.e., by stacking an active short stroke system providing fine adjustments on top of a passive long stroke system. This paper describes the development of a full 6-DoF active positioning system with nm-level motion performance in one single (long stroke) stage, using active magnetic bearing systems. It is shown that active bearings provide interesting advantages and additional features for substrate positioning, enabling a rather simple and cost effective stage design, suitable for next generation semiconductor applications.

LanguageEnglish
Pages1372-1375
Number of pages4
JournalMicroelectronic Engineering
Volume83
Issue number4-9
DOIs
StatePublished - 1 Apr 2006
Externally publishedYes

Fingerprint

Bearings (structural)
Magnetic levitation
levitation
strokes
positioning
Semiconductor materials
Roller bearings
Magnetic bearings
degrees of freedom
roller bearings
costs
magnetic bearings
gas bearings
Costs
adjusting
Substrates
Air

Keywords

  • Cost effectiveness
  • Magnetic levitation
  • nm-Level positioning performance
  • Semiconductor applications

Cite this

Peijnenburg, A. T.A. ; Vermeulen, J. P.M. ; van Eijk, J./ Magnetic levitation systems compared to conventional bearing systems. In: Microelectronic Engineering. 2006 ; Vol. 83, No. 4-9 . pp. 1372-1375
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Magnetic levitation systems compared to conventional bearing systems. / Peijnenburg, A. T.A.; Vermeulen, J. P.M.; van Eijk, J.

In: Microelectronic Engineering, Vol. 83, No. 4-9 , 01.04.2006, p. 1372-1375.

Research output: Contribution to journalArticleAcademicpeer-review

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