LPCVD reactorontwerp

P.C. Kuiper, Technische Universiteit Eindhoven (TUE). Stan Ackermans Instituut. Proces-technologie

    Research output: ThesisPd Eng Thesis

    Original languageDutch
    QualificationDoctor of Philosophy
    Awarding Institution
    Supervisors/Advisors
    • Marin, G.B.M.M., Supervisor
    • Metselaar, Ruud, Supervisor
    • de Croon, Mart, Supervisor
    Award date1 Jan 1992
    Place of PublicationEindhoven
    Publisher
    Print ISBNs90-5282-228-X
    Publication statusPublished - 1992

    Bibliographical note

    Eindverslag

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