Abstract
Since its inception in the beginning of the twentieth century, low-temperature plasma science has become a major ¿eld of science. Low-temperature plasma sources and gas discharges are found in domestic, industrial, atmospheric and extra-terrestrial settings. Examples of domestic discharges are those used in lighting and plasma display panels (PDP’s). In industry, plasma sources are widely used for material processing; among the many applications are deposition and feature etching in the fabrication of electronic devices and surface modi¿cation of textile. More recently, bio-medical applications of
plasmas have been developed.
Original language | English |
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Title of host publication | Proceedings of the 8th Technological Plasma Workshop (TPW), 6-7 January 2011, Bristol , United Kingdom |
Place of Publication | Bristol , United Kingdom |
Pages | 1-92 |
Publication status | Published - 2011 |
Event | conference; 8th Technological Plasma Workshop (TPW) - Duration: 1 Jan 2011 → … |
Conference
Conference | conference; 8th Technological Plasma Workshop (TPW) |
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Period | 1/01/11 → … |
Other | 8th Technological Plasma Workshop (TPW) |