Low-temperature plasma-assisted atomic layer deposition of silicon nitride moisture permeation barrier layers

A. Andringa, A. Perrotta, K. de Peuter, H.C.M. Knoops, W.M.M. Kessels, M. Creatore

Research output: Contribution to journalArticleAcademicpeer-review

62 Citations (Scopus)
30 Downloads (Pure)
Original languageEnglish
Pages (from-to)22525-22532
JournalACS Applied Materials & Interfaces
Issue number40
Publication statusPublished - 2015

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