Low temperature phase-controlled synthesis of titanium di- and tri-sulfide by atomic layer deposition

Saravana Basuvalingam (Corresponding author), Yue Zhang, Matthew Bloodgood, Rasmus H. Godiksen, Alberto González Curto, Jan Philipp Hofmann, Marcel Verheijen, Erwin Kessels, Ageeth Bol (Corresponding author)

Research output: Contribution to journal › Article › Academic › peer-review

39 Citations (Scopus)
326 Downloads (Pure)

Fingerprint

Dive into the research topics of 'Low temperature phase-controlled synthesis of titanium di- and tri-sulfide by atomic layer deposition'. Together they form a unique fingerprint.

Material Science