Low-temperature aluminium oxide deposition using the extending thermal plasma technique : film properties and applications

I. Volintiru, J.L. Hemmen, van, M. Creatore, M.C.M. van de Sanden

Research output: Contribution to conferencePoster

Fingerprint Dive into the research topics of 'Low-temperature aluminium oxide deposition using the extending thermal plasma technique : film properties and applications'. Together they form a unique fingerprint.

Physics & Astronomy