Low-pressure source of slow metastable rare gas atoms

M.H.L. Velden, van der; H. Batelaan; E. Sligte, te; H.C.W. Beijerinck; E.J.D. Vredenbregt

doi:10.1063/1.1666988

Low-pressure source of slow metastable rare gas atoms

M.H.L. Velden, van der, H. Batelaan, E. Sligte, te, H.C.W. Beijerinck, E.J.D. Vredenbregt

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Abstract

We investigate the properties of a commercial inverted magnetron pressure gauge for use as a source of slow metastable rare gas atoms. We find that the velocity distribution of the atoms as well as the pressure dependence of the output flux agree with a simple model. This shows that the low-velocity output of the source is enhanced over the Maxwell-Boltzmann form due to a velocity-dependent excitation probability. For argon, the center-line intensity per unit area of the source is measured to be greater than 4.2*10/sup 15/ Ar 1s/sub 5/ atoms/(s sr m/sup 2/) at a pressure of 23 mPa. When observing the entire source area, the center-line intensity is at least 2.6*10/sup 11/ Ar 1s/sub 5/ atoms/(s sr)

Original language	English
Pages (from-to)	1073-1077
Journal	Review of Scientific Instruments
Volume	75
Issue number	4
DOIs	https://doi.org/10.1063/1.1666988
Publication status	Published - 2004

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title = "Low-pressure source of slow metastable rare gas atoms",

abstract = "We investigate the properties of a commercial inverted magnetron pressure gauge for use as a source of slow metastable rare gas atoms. We find that the velocity distribution of the atoms as well as the pressure dependence of the output flux agree with a simple model. This shows that the low-velocity output of the source is enhanced over the Maxwell-Boltzmann form due to a velocity-dependent excitation probability. For argon, the center-line intensity per unit area of the source is measured to be greater than 4.2*10/sup 15/ Ar 1s/sub 5/ atoms/(s sr m/sup 2/) at a pressure of 23 mPa. When observing the entire source area, the center-line intensity is at least 2.6*10/sup 11/ Ar 1s/sub 5/ atoms/(s sr)",

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T1 - Low-pressure source of slow metastable rare gas atoms

AU - Velden, van der, M.H.L.

AU - Batelaan, H.

AU - Sligte, te, E.

AU - Beijerinck, H.C.W.

AU - Vredenbregt, E.J.D.

PY - 2004

Y1 - 2004

N2 - We investigate the properties of a commercial inverted magnetron pressure gauge for use as a source of slow metastable rare gas atoms. We find that the velocity distribution of the atoms as well as the pressure dependence of the output flux agree with a simple model. This shows that the low-velocity output of the source is enhanced over the Maxwell-Boltzmann form due to a velocity-dependent excitation probability. For argon, the center-line intensity per unit area of the source is measured to be greater than 4.2*10/sup 15/ Ar 1s/sub 5/ atoms/(s sr m/sup 2/) at a pressure of 23 mPa. When observing the entire source area, the center-line intensity is at least 2.6*10/sup 11/ Ar 1s/sub 5/ atoms/(s sr)

AB - We investigate the properties of a commercial inverted magnetron pressure gauge for use as a source of slow metastable rare gas atoms. We find that the velocity distribution of the atoms as well as the pressure dependence of the output flux agree with a simple model. This shows that the low-velocity output of the source is enhanced over the Maxwell-Boltzmann form due to a velocity-dependent excitation probability. For argon, the center-line intensity per unit area of the source is measured to be greater than 4.2*10/sup 15/ Ar 1s/sub 5/ atoms/(s sr m/sup 2/) at a pressure of 23 mPa. When observing the entire source area, the center-line intensity is at least 2.6*10/sup 11/ Ar 1s/sub 5/ atoms/(s sr)

U2 - 10.1063/1.1666988

DO - 10.1063/1.1666988

M3 - Article

SN - 0034-6748

VL - 75

SP - 1073

EP - 1077

JO - Review of Scientific Instruments

JF - Review of Scientific Instruments

IS - 4

ER -

Low-pressure source of slow metastable rare gas atoms

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