Low-pressure source of slow metastable rare gas atoms

M.H.L. Velden, van der, H. Batelaan, E. Sligte, te, H.C.W. Beijerinck, E.J.D. Vredenbregt

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Abstract

We investigate the properties of a commercial inverted magnetron pressure gauge for use as a source of slow metastable rare gas atoms. We find that the velocity distribution of the atoms as well as the pressure dependence of the output flux agree with a simple model. This shows that the low-velocity output of the source is enhanced over the Maxwell-Boltzmann form due to a velocity-dependent excitation probability. For argon, the center-line intensity per unit area of the source is measured to be greater than 4.2*10/sup 15/ Ar 1s/sub 5/ atoms/(s sr m/sup 2/) at a pressure of 23 mPa. When observing the entire source area, the center-line intensity is at least 2.6*10/sup 11/ Ar 1s/sub 5/ atoms/(s sr)
Original languageEnglish
Pages (from-to)1073-1077
JournalReview of Scientific Instruments
Volume75
Issue number4
DOIs
Publication statusPublished - 2004

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