@inproceedings{9d639fcc7cff451fa4f90fcca7a7ff72,
title = "Low hydrogen incorporation in microwave downstream deposited SiO2 layers",
author = "{Hassel, van}, J.G. and {IJzendoorn, van}, L.J.",
year = "1994",
language = "English",
pages = "197--204",
booktitle = "Proc. 21st State of the Art Progr. on Compound Semiconductors, SOTAPOCS XXI, 186th Meeting of the Electrochemical Society",
note = "conference; Proc. 21st State of the Art Progr. on Compound Semiconductors, SOTAPOCS XXI, 186th Meeting of the Electrochemical Society, Miami Beach, FL, 9 October 1994 ; Conference date: 01-01-1994",
}