Low frequency noise analysis as a diagnostic tool to assess the quality of 0.25 m Ti-silicided poly lines

E.P. Vandamme, I. Wolf, de, A. Lauwers, L.K.J. Vandamme

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageEnglish
Title of host publicationProc. Reliability of Electron Devices, Failure Physics and Analysis
PublisherPergamon
Pages925-929
Publication statusPublished - 1998
EventReliability of Electron Devices, Failure Physics and Analysis, October 5-9, 1998, Copenhagen, Denmark - Copenhagen, Denmark
Duration: 5 Oct 19989 Oct 1998

Conference

ConferenceReliability of Electron Devices, Failure Physics and Analysis, October 5-9, 1998, Copenhagen, Denmark
Country/TerritoryDenmark
CityCopenhagen
Period5/10/989/10/98

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