Low damage deposition of silicon nitride on InP substrates

F. Karouta; J.G. Hassel, van; A. Kalfane; C.M. Es, van; T.J. Eijkemans

Low damage deposition of silicon nitride on InP substrates

F. Karouta
, J.G. Hassel, van
, A. Kalfane
, C.M. Es, van
, T.J. Eijkemans

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	English
Title of host publication	Proc. 13th International Conference on Chemical Capor Deposition, CVD-XIII, 189th Meeting of the Electrochemical Society
Editors	T.M. Besmann, et. al.
Pages	516-522
Publication status	Published - 1996
Event	conference; Proc. 13th International Conference on Chemical Capor Deposition, CVD-XIII, 189th Meeting of the Electrochemical Society, Los Angeles, CA, May 1996 - Duration: 1 Jan 1996 → …

Conference

Conference	conference; Proc. 13th International Conference on Chemical Capor Deposition, CVD-XIII, 189th Meeting of the Electrochemical Society, Los Angeles, CA, May 1996
Period	1/01/96 → …
Other	Proc. 13th International Conference on Chemical Capor Deposition, CVD-XIII, 189th Meeting of the Electrochemical Society, Los Angeles, CA, May 1996

Cite this

@inproceedings{ea5b58e9e72843d287f91f6e02879ca7,

title = "Low damage deposition of silicon nitride on InP substrates",

author = "F. Karouta and \{Hassel, van\}, J.G. and A. Kalfane and \{Es, van\}, C.M. and T.J. Eijkemans",

year = "1996",

language = "English",

isbn = "1-56677-155-2",

pages = "516--522",

editor = "T.M. Besmann and et. al.",

booktitle = "Proc. 13th International Conference on Chemical Capor Deposition, CVD-XIII, 189th Meeting of the Electrochemical Society",

note = "conference; Proc. 13th International Conference on Chemical Capor Deposition, CVD-XIII, 189th Meeting of the Electrochemical Society, Los Angeles, CA, May 1996 ; Conference date: 01-01-1996",

}

Karouta, F, Hassel, van, JG, Kalfane, A, Es, van, CM & Eijkemans, TJ 1996, Low damage deposition of silicon nitride on InP substrates. in TM Besmann & E al. (eds), Proc. 13th International Conference on Chemical Capor Deposition, CVD-XIII, 189th Meeting of the Electrochemical Society. pp. 516-522, conference; Proc. 13th International Conference on Chemical Capor Deposition, CVD-XIII, 189th Meeting of the Electrochemical Society, Los Angeles, CA, May 1996, 1/01/96.

Low damage deposition of silicon nitride on InP substrates. / Karouta, F.; Hassel, van, J.G.; Kalfane, A. et al.
Proc. 13th International Conference on Chemical Capor Deposition, CVD-XIII, 189th Meeting of the Electrochemical Society. ed. / T.M. Besmann; et. al. 1996. p. 516-522.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Low damage deposition of silicon nitride on InP substrates

AU - Karouta, F.

AU - Hassel, van, J.G.

AU - Kalfane, A.

AU - Es, van, C.M.

AU - Eijkemans, T.J.

PY - 1996

Y1 - 1996

M3 - Conference contribution

SN - 1-56677-155-2

SP - 516

EP - 522

BT - Proc. 13th International Conference on Chemical Capor Deposition, CVD-XIII, 189th Meeting of the Electrochemical Society

A2 - Besmann, T.M.

A2 - al., et.

T2 - conference; Proc. 13th International Conference on Chemical Capor Deposition, CVD-XIII, 189th Meeting of the Electrochemical Society, Los Angeles, CA, May 1996

Y2 - 1 January 1996

ER -