Low damage deposition of silicon nitride on InP substrates

F. Karouta; J.G. Hassel, van; A. Kalfane; C.M. Es, van; T.J. Eijkemans

Low damage deposition of silicon nitride on InP substrates

F. Karouta, J.G. Hassel, van, A. Kalfane, C.M. Es, van, T.J. Eijkemans

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	English
Title of host publication	Proc. 13th International Conference on Chemical Capor Deposition, CVD-XIII, 189th Meeting of the Electrochemical Society
Editors	T.M. Besmann, et. al.
Pages	516-522
Publication status	Published - 1996
Event	conference; Proc. 13th International Conference on Chemical Capor Deposition, CVD-XIII, 189th Meeting of the Electrochemical Society, Los Angeles, CA, May 1996 - Duration: 1 Jan 1996 → …

Conference

Conference	conference; Proc. 13th International Conference on Chemical Capor Deposition, CVD-XIII, 189th Meeting of the Electrochemical Society, Los Angeles, CA, May 1996
Period	1/01/96 → …
Other	Proc. 13th International Conference on Chemical Capor Deposition, CVD-XIII, 189th Meeting of the Electrochemical Society, Los Angeles, CA, May 1996

Cite this

Karouta, F., Hassel, van, J. G., Kalfane, A., Es, van, C. M., & Eijkemans, T. J. (1996). Low damage deposition of silicon nitride on InP substrates. In T. M. Besmann, & E. al. (Eds.), Proc. 13th International Conference on Chemical Capor Deposition, CVD-XIII, 189th Meeting of the Electrochemical Society (pp. 516-522)

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title = "Low damage deposition of silicon nitride on InP substrates",

author = "F. Karouta and {Hassel, van}, J.G. and A. Kalfane and {Es, van}, C.M. and T.J. Eijkemans",

year = "1996",

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isbn = "1-56677-155-2",

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Karouta, F, Hassel, van, JG, Kalfane, A, Es, van, CM & Eijkemans, TJ 1996, Low damage deposition of silicon nitride on InP substrates. in TM Besmann & E al. (eds), Proc. 13th International Conference on Chemical Capor Deposition, CVD-XIII, 189th Meeting of the Electrochemical Society. pp. 516-522, conference; Proc. 13th International Conference on Chemical Capor Deposition, CVD-XIII, 189th Meeting of the Electrochemical Society, Los Angeles, CA, May 1996, 1/01/96.

Low damage deposition of silicon nitride on InP substrates. / Karouta, F.; Hassel, van, J.G.; Kalfane, A.; Es, van, C.M.; Eijkemans, T.J.

Proc. 13th International Conference on Chemical Capor Deposition, CVD-XIII, 189th Meeting of the Electrochemical Society. ed. / T.M. Besmann; et. al. 1996. p. 516-522.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Low damage deposition of silicon nitride on InP substrates

AU - Karouta, F.

AU - Hassel, van, J.G.

AU - Kalfane, A.

AU - Es, van, C.M.

AU - Eijkemans, T.J.

PY - 1996

Y1 - 1996

M3 - Conference contribution

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BT - Proc. 13th International Conference on Chemical Capor Deposition, CVD-XIII, 189th Meeting of the Electrochemical Society

A2 - Besmann, T.M.

A2 - al., et.

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