Low damage deposition of silicon nitride on InP substrates

F. Karouta, J.G. Hassel, van, A. Kalfane, C.M. Es, van, T.J. Eijkemans

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageEnglish
Title of host publicationProc. 13th International Conference on Chemical Capor Deposition, CVD-XIII, 189th Meeting of the Electrochemical Society
EditorsT.M. Besmann, et. al.
Pages516-522
Publication statusPublished - 1996
Eventconference; Proc. 13th International Conference on Chemical Capor Deposition, CVD-XIII, 189th Meeting of the Electrochemical Society, Los Angeles, CA, May 1996 -
Duration: 1 Jan 1996 → …

Conference

Conferenceconference; Proc. 13th International Conference on Chemical Capor Deposition, CVD-XIII, 189th Meeting of the Electrochemical Society, Los Angeles, CA, May 1996
Period1/01/96 → …
OtherProc. 13th International Conference on Chemical Capor Deposition, CVD-XIII, 189th Meeting of the Electrochemical Society, Los Angeles, CA, May 1996

Cite this

Karouta, F., Hassel, van, J. G., Kalfane, A., Es, van, C. M., & Eijkemans, T. J. (1996). Low damage deposition of silicon nitride on InP substrates. In T. M. Besmann, & E. al. (Eds.), Proc. 13th International Conference on Chemical Capor Deposition, CVD-XIII, 189th Meeting of the Electrochemical Society (pp. 516-522)
Karouta, F. ; Hassel, van, J.G. ; Kalfane, A. ; Es, van, C.M. ; Eijkemans, T.J. / Low damage deposition of silicon nitride on InP substrates. Proc. 13th International Conference on Chemical Capor Deposition, CVD-XIII, 189th Meeting of the Electrochemical Society. editor / T.M. Besmann ; et. al. 1996. pp. 516-522
@inproceedings{ea5b58e9e72843d287f91f6e02879ca7,
title = "Low damage deposition of silicon nitride on InP substrates",
author = "F. Karouta and {Hassel, van}, J.G. and A. Kalfane and {Es, van}, C.M. and T.J. Eijkemans",
year = "1996",
language = "English",
isbn = "1-56677-155-2",
pages = "516--522",
editor = "T.M. Besmann and et. al.",
booktitle = "Proc. 13th International Conference on Chemical Capor Deposition, CVD-XIII, 189th Meeting of the Electrochemical Society",

}

Karouta, F, Hassel, van, JG, Kalfane, A, Es, van, CM & Eijkemans, TJ 1996, Low damage deposition of silicon nitride on InP substrates. in TM Besmann & E al. (eds), Proc. 13th International Conference on Chemical Capor Deposition, CVD-XIII, 189th Meeting of the Electrochemical Society. pp. 516-522, conference; Proc. 13th International Conference on Chemical Capor Deposition, CVD-XIII, 189th Meeting of the Electrochemical Society, Los Angeles, CA, May 1996, 1/01/96.

Low damage deposition of silicon nitride on InP substrates. / Karouta, F.; Hassel, van, J.G.; Kalfane, A.; Es, van, C.M.; Eijkemans, T.J.

Proc. 13th International Conference on Chemical Capor Deposition, CVD-XIII, 189th Meeting of the Electrochemical Society. ed. / T.M. Besmann; et. al. 1996. p. 516-522.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - Low damage deposition of silicon nitride on InP substrates

AU - Karouta, F.

AU - Hassel, van, J.G.

AU - Kalfane, A.

AU - Es, van, C.M.

AU - Eijkemans, T.J.

PY - 1996

Y1 - 1996

M3 - Conference contribution

SN - 1-56677-155-2

SP - 516

EP - 522

BT - Proc. 13th International Conference on Chemical Capor Deposition, CVD-XIII, 189th Meeting of the Electrochemical Society

A2 - Besmann, T.M.

A2 - al., et.

ER -

Karouta F, Hassel, van JG, Kalfane A, Es, van CM, Eijkemans TJ. Low damage deposition of silicon nitride on InP substrates. In Besmann TM, al. E, editors, Proc. 13th International Conference on Chemical Capor Deposition, CVD-XIII, 189th Meeting of the Electrochemical Society. 1996. p. 516-522