@inproceedings{ea5b58e9e72843d287f91f6e02879ca7,
title = "Low damage deposition of silicon nitride on InP substrates",
author = "F. Karouta and {Hassel, van}, J.G. and A. Kalfane and {Es, van}, C.M. and T.J. Eijkemans",
year = "1996",
language = "English",
isbn = "1-56677-155-2",
pages = "516--522",
editor = "T.M. Besmann and et. al.",
booktitle = "Proc. 13th International Conference on Chemical Capor Deposition, CVD-XIII, 189th Meeting of the Electrochemical Society",
note = "conference; Proc. 13th International Conference on Chemical Capor Deposition, CVD-XIII, 189th Meeting of the Electrochemical Society, Los Angeles, CA, May 1996 ; Conference date: 01-01-1996",
}