Low-cost monolithic processing of large-area ultrasound transducer arrays

L.C.J.M. Peters; R. Ollearo; R.G.F.A. Verbeek; J.L.P.J. van der Steen; H.B. Akkerman; A.W.F. Volker; P.L.M.J. van Neer; G.H. Gelinck

doi:10.1109/ULTSYM.2019.8926238

Low-cost monolithic processing of large-area ultrasound transducer arrays

L.C.J.M. Peters
, R. Ollearo
, R.G.F.A. Verbeek
, J.L.P.J. van der Steen
, H.B. Akkerman
, A.W.F. Volker
, P.L.M.J. van Neer
, G.H. Gelinck

Materials to Optoelectronic Devices

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

3 Citations (Scopus)

Abstract

Large-area flexible ultrasound arrays can offer new ultrasound modalities in multiple fields. The production of these arrays when using CMOS-type fabrication techniques faces scalability challenges and costs increase dramatically when upscaled to large dimensions. We investigate the monolithic production of large-area PPT (Printed Polymer Transducer) arrays directly on a flexible substrate. Here, a vibrating membrane is defined by a circular opening in a thick photoresist layer. Since the photoresist layer is processed on top of the P(VDF-TrFE), a thin barrier layer is used to prevent diffusion into the P(VDF-TrFE). An annealing procedure is developed to reduce the surface roughness of the P(VDF-TrFE) layer and make it compatible with thin film electrode deposition. We measure a remnant polarization of 7-8 μC/cm² and a coercive field of around 50 MV/m. Laser scanning vibrometer measurements reveal a uniform peak displacement and fundamental resonance frequency (66 kHz) across the PPT array.

Original language	English
Title of host publication	2019 IEEE International Ultrasonics Symposium, IUS 2019
Place of Publication	Piscataway
Publisher	IEEE Computer Society
Pages	60-63
Number of pages	4
ISBN (Electronic)	9781728145969
DOIs	https://doi.org/10.1109/ULTSYM.2019.8926238
Publication status	Published - Oct 2019
Event	2019 IEEE International Ultrasonics Symposium, IUS 2019 - Glasgow, United Kingdom Duration: 6 Oct 2019 → 9 Oct 2019

Conference

Conference	2019 IEEE International Ultrasonics Symposium, IUS 2019
Country/Territory	United Kingdom
City	Glasgow
Period	6/10/19 → 9/10/19

Funding

ACKNOWLEDGMENT This work has been supported by the ECSEL project SILENSE (ID 737487).

Keywords

flexible
large-area
ultrasound transducer

Access to Document

10.1109/ULTSYM.2019.8926238

Cite this

Peters, L. C. J. M., Ollearo, R., Verbeek, R. G. F. A., van der Steen, J. L. P. J., Akkerman, H. B., Volker, A. W. F., van Neer, P. L. M. J., & Gelinck, G. H. (2019). Low-cost monolithic processing of large-area ultrasound transducer arrays. In 2019 IEEE International Ultrasonics Symposium, IUS 2019 (pp. 60-63). Article 8926238 IEEE Computer Society. https://doi.org/10.1109/ULTSYM.2019.8926238

@inproceedings{310927946cd240908ef334f75ed858b3,

title = "Low-cost monolithic processing of large-area ultrasound transducer arrays",

abstract = "Large-area flexible ultrasound arrays can offer new ultrasound modalities in multiple fields. The production of these arrays when using CMOS-type fabrication techniques faces scalability challenges and costs increase dramatically when upscaled to large dimensions. We investigate the monolithic production of large-area PPT (Printed Polymer Transducer) arrays directly on a flexible substrate. Here, a vibrating membrane is defined by a circular opening in a thick photoresist layer. Since the photoresist layer is processed on top of the P(VDF-TrFE), a thin barrier layer is used to prevent diffusion into the P(VDF-TrFE). An annealing procedure is developed to reduce the surface roughness of the P(VDF-TrFE) layer and make it compatible with thin film electrode deposition. We measure a remnant polarization of 7-8 μC/cm2 and a coercive field of around 50 MV/m. Laser scanning vibrometer measurements reveal a uniform peak displacement and fundamental resonance frequency (66 kHz) across the PPT array.",

keywords = "flexible, large-area, ultrasound transducer",

author = "L.C.J.M. Peters and R. Ollearo and R.G.F.A. Verbeek and \{van der Steen\}, J.L.P.J. and H.B. Akkerman and A.W.F. Volker and \{van Neer\}, P.L.M.J. and G.H. Gelinck",

year = "2019",

month = oct,

doi = "10.1109/ULTSYM.2019.8926238",

language = "English",

pages = "60--63",

booktitle = "2019 IEEE International Ultrasonics Symposium, IUS 2019",

publisher = "IEEE Computer Society",

address = "United States",

note = "2019 IEEE International Ultrasonics Symposium, IUS 2019 ; Conference date: 06-10-2019 Through 09-10-2019",

}

Peters, LCJM, Ollearo, R, Verbeek, RGFA, van der Steen, JLPJ, Akkerman, HB, Volker, AWF, van Neer, PLMJ & Gelinck, GH 2019, Low-cost monolithic processing of large-area ultrasound transducer arrays. in 2019 IEEE International Ultrasonics Symposium, IUS 2019., 8926238, IEEE Computer Society, Piscataway, pp. 60-63, 2019 IEEE International Ultrasonics Symposium, IUS 2019, Glasgow, United Kingdom, 6/10/19. https://doi.org/10.1109/ULTSYM.2019.8926238

TY - GEN

T1 - Low-cost monolithic processing of large-area ultrasound transducer arrays

AU - Peters, L.C.J.M.

AU - Ollearo, R.

AU - Verbeek, R.G.F.A.

AU - van der Steen, J.L.P.J.

AU - Akkerman, H.B.

AU - Volker, A.W.F.

AU - van Neer, P.L.M.J.

AU - Gelinck, G.H.

PY - 2019/10

Y1 - 2019/10

N2 - Large-area flexible ultrasound arrays can offer new ultrasound modalities in multiple fields. The production of these arrays when using CMOS-type fabrication techniques faces scalability challenges and costs increase dramatically when upscaled to large dimensions. We investigate the monolithic production of large-area PPT (Printed Polymer Transducer) arrays directly on a flexible substrate. Here, a vibrating membrane is defined by a circular opening in a thick photoresist layer. Since the photoresist layer is processed on top of the P(VDF-TrFE), a thin barrier layer is used to prevent diffusion into the P(VDF-TrFE). An annealing procedure is developed to reduce the surface roughness of the P(VDF-TrFE) layer and make it compatible with thin film electrode deposition. We measure a remnant polarization of 7-8 μC/cm2 and a coercive field of around 50 MV/m. Laser scanning vibrometer measurements reveal a uniform peak displacement and fundamental resonance frequency (66 kHz) across the PPT array.

AB - Large-area flexible ultrasound arrays can offer new ultrasound modalities in multiple fields. The production of these arrays when using CMOS-type fabrication techniques faces scalability challenges and costs increase dramatically when upscaled to large dimensions. We investigate the monolithic production of large-area PPT (Printed Polymer Transducer) arrays directly on a flexible substrate. Here, a vibrating membrane is defined by a circular opening in a thick photoresist layer. Since the photoresist layer is processed on top of the P(VDF-TrFE), a thin barrier layer is used to prevent diffusion into the P(VDF-TrFE). An annealing procedure is developed to reduce the surface roughness of the P(VDF-TrFE) layer and make it compatible with thin film electrode deposition. We measure a remnant polarization of 7-8 μC/cm2 and a coercive field of around 50 MV/m. Laser scanning vibrometer measurements reveal a uniform peak displacement and fundamental resonance frequency (66 kHz) across the PPT array.

KW - flexible

KW - large-area

KW - ultrasound transducer

UR - https://www.scopus.com/pages/publications/85077521224

U2 - 10.1109/ULTSYM.2019.8926238

DO - 10.1109/ULTSYM.2019.8926238

M3 - Conference contribution

AN - SCOPUS:85077521224

SP - 60

EP - 63

BT - 2019 IEEE International Ultrasonics Symposium, IUS 2019

PB - IEEE Computer Society

CY - Piscataway

T2 - 2019 IEEE International Ultrasonics Symposium, IUS 2019

Y2 - 6 October 2019 through 9 October 2019

ER -

Low-cost monolithic processing of large-area ultrasound transducer arrays

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