Low-cost monolithic processing of large-area ultrasound transducer arrays

L.C.J.M. Peters, R. Ollearo, R.G.F.A. Verbeek, J.L.P.J. van der Steen, H.B. Akkerman, A.W.F. Volker, P.L.M.J. van Neer, G.H. Gelinck

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Abstract

Large-area flexible ultrasound arrays can offer new ultrasound modalities in multiple fields. The production of these arrays when using CMOS-type fabrication techniques faces scalability challenges and costs increase dramatically when upscaled to large dimensions. We investigate the monolithic production of large-area PPT (Printed Polymer Transducer) arrays directly on a flexible substrate. Here, a vibrating membrane is defined by a circular opening in a thick photoresist layer. Since the photoresist layer is processed on top of the P(VDF-TrFE), a thin barrier layer is used to prevent diffusion into the P(VDF-TrFE). An annealing procedure is developed to reduce the surface roughness of the P(VDF-TrFE) layer and make it compatible with thin film electrode deposition. We measure a remnant polarization of 7-8 μC/cm2 and a coercive field of around 50 MV/m. Laser scanning vibrometer measurements reveal a uniform peak displacement and fundamental resonance frequency (66 kHz) across the PPT array.

Original languageEnglish
Title of host publication2019 IEEE International Ultrasonics Symposium, IUS 2019
Place of PublicationPiscataway
PublisherIEEE Computer Society
Pages60-63
Number of pages4
ISBN (Electronic)9781728145969
DOIs
Publication statusPublished - Oct 2019
Event2019 IEEE International Ultrasonics Symposium, IUS 2019 - Glasgow, United Kingdom
Duration: 6 Oct 20199 Oct 2019

Conference

Conference2019 IEEE International Ultrasonics Symposium, IUS 2019
CountryUnited Kingdom
CityGlasgow
Period6/10/199/10/19

Keywords

  • flexible
  • large-area
  • ultrasound transducer

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    Peters, L. C. J. M., Ollearo, R., Verbeek, R. G. F. A., van der Steen, J. L. P. J., Akkerman, H. B., Volker, A. W. F., van Neer, P. L. M. J., & Gelinck, G. H. (2019). Low-cost monolithic processing of large-area ultrasound transducer arrays. In 2019 IEEE International Ultrasonics Symposium, IUS 2019 (pp. 60-63). [8926238] IEEE Computer Society. https://doi.org/10.1109/ULTSYM.2019.8926238