Abstract
Piezo-stepper actuators consist of piezo elements that are able to displace a mover over an infinite stroke through walking while maintaining the high accuracy and high stiffness properties of the piezo elements. In Figure 1, a schematic representation of a piezo-stepper actuator is depicted.
Original language | English |
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Title of host publication | First Euspen Special Interest Group Meeting on Precision Motion Systems & Control |
Publication status | Published - 2020 |
Event | 1st Euspen Special Interest Group Meeting on Precision Motion Systems & Control - Virtual, Aachen, Germany Duration: 17 Nov 2020 → 18 Nov 2020 Conference number: 1 https://www.euspen.eu/events/sig-precisionmotion-2020/ |
Conference
Conference | 1st Euspen Special Interest Group Meeting on Precision Motion Systems & Control |
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Country/Territory | Germany |
City | Aachen |
Period | 17/11/20 → 18/11/20 |
Internet address |