Long Range Accurate Piezo Actuation Concept: Advanced Long Range Piezo Stage

Andrew Wasef

Research output: ThesisPd Eng Thesis

Original languageEnglish
Supervisors/Advisors
  • van Baars, Gregor E., Supervisor
  • Jansen, Bas, External supervisor, External person
Place of PublicationEindhoven
Publisher
Publication statusPublished - Oct 2020

Bibliographical note

PdEng thesis. - Confidential

Cite this