Long gauge block measurements based on a Twyman-Green interferometer and three stabilized lasers

H. Haitjema, G.J.W.L. Kotte

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

9 Citations (Scopus)

Abstract

An interferometer is realized, based on the Twyman-Green Interferometer principle for the calibration of long gauge blocks and length bars in the 100-1000 mm range with an uncertainty of 0.02 micrometers + 0,1 micrometers /m. Also the expansion coefficient of gauge blocks and even of rod-shaped materials with non-optical flat faces can be calibrated in the 18-22 degrees C range with an uncertainty below 1 X 10-7/K. The set-up basically follows the most commonly used interferometer arrangements for long gauge blocks as they are described by Darnedde, Ikonen and Lewis where the most similarities with the latter occur. The set- up has some peculiarities which make the measurement straightforward, accurate and reliable.
Original languageEnglish
Title of host publicationRecent developments in optical gauge block metrology, 20-21 July 1998, San Diego, California
EditorsJ.E. Decker
Place of PublicationBellingham
PublisherSPIE
Pages25-34
ISBN (Print)0-8194-2932-5
DOIs
Publication statusPublished - 1998
Eventconference; Recent developments in optical gauge block metrology -
Duration: 1 Jan 1998 → …

Publication series

NameProceedings of SPIE
Volume3477
ISSN (Print)0277-786X

Conference

Conferenceconference; Recent developments in optical gauge block metrology
Period1/01/98 → …
OtherRecent developments in optical gauge block metrology

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