Abstract
The usage of a spatial spectral domain integral equation solver for electromagnetic scattering from dielectric objects provides a means to execute scattering simulations for lithography. We consider the extension of the local normal vector field formulation to support polygonal building blocks in a Gabor series representation of functions.
| Original language | English |
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| Pages | 61-62 |
| Number of pages | 2 |
| Publication status | Published - 16 Feb 2020 |
| Event | Scientific Computing in Electrical Engineering, SCEE 2020 - Eindhoven, the Netherlands, Eindhoven, Netherlands Duration: 16 Feb 2020 → 20 Feb 2020 https://scee-conferences.org/ |
Conference
| Conference | Scientific Computing in Electrical Engineering, SCEE 2020 |
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| Abbreviated title | SCEE 2020 |
| Country/Territory | Netherlands |
| City | Eindhoven |
| Period | 16/02/20 → 20/02/20 |
| Internet address |