Local normal vector field formulation for polygonal building blocks in a Gabor representation

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Abstract

The usage of a spatial spectral domain integral equation solver for electromagnetic scattering from dielectric objects provides a means to execute scattering simulations for lithography. We consider the extension of the local normal vector field formulation to support polygonal building blocks in a Gabor series representation of functions.
Original languageEnglish
Pages61-62
Number of pages2
Publication statusPublished - 16 Feb 2020
EventScientific Computing in Electrical Engineering, SCEE 2020 - Eindhoven, the Netherlands, Eindhoven, Netherlands
Duration: 16 Feb 202020 Feb 2020
https://scee-conferences.org/

Conference

ConferenceScientific Computing in Electrical Engineering, SCEE 2020
Abbreviated titleSCEE 2020
Country/TerritoryNetherlands
CityEindhoven
Period16/02/2020/02/20
Internet address

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