Local digital etching and infiltration for tuning of a H1- Cavity in deeply etched InP/InGaAsP/InP photonic crystals

H.H.J.E. Kicken, P.F.A. Alkemade, R.W. Heijden, van der, F. Karouta, R. Nötzel, E.W.J.M. Drift, van der, H.W.M. Salemink

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Physics & Astronomy