Living chips and chips for the living

R. Dekker, S. Braam, V. Henneken, A. van der Horst, S. Khoshfetrat Pakazad, M. Louwerse, B. van Meer, B. Mimoun, A. Savov, A. van de Stolpe

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

3 Citations (Scopus)

Abstract

In this paper we present a polymer-last approach for the fabrication of (partly) flexible and stretchable sensors assemblies. The Flex-to-Rigid (F2R) platform is based on this approach and especially designed for the fabrication of very small sensor systems which can be folded into, or around the tip of minimal invasive instruments such as laparoscopic instruments, catheters or guide-wires. As an example the fabrication and assembly of a combined pressure and flow sensor on the tip of a 360 μm diameter guide-wire is presented. The F2R platform uses standard silicon manufacturing equipment in a standard production environment and is therefore suitable for high volume production. Using the same polymerlast approach stretchable circuits have been fabricated. As an example a stretchable Micro-Electrode Array for electrophysiology is demonstrated. The paper ends with an outlook on an entire new field in micro fabrication where living cells are co-integrated with silicon bases micro-systems resulting in truly Living Chips.

Original languageEnglish
Title of host publication2012 IEEE Bipolar/BiCMOS Circuits and Technology Meeting, BCTM 2012
Number of pages9
DOIs
Publication statusPublished - 12 Dec 2012
Externally publishedYes
Event2012 IEEE Bipolar/BiCMOS Circuits and Technology Meeting, BCTM 2012 - Portland, OR, United States
Duration: 30 Sep 20123 Oct 2012

Conference

Conference2012 IEEE Bipolar/BiCMOS Circuits and Technology Meeting, BCTM 2012
Country/TerritoryUnited States
CityPortland, OR
Period30/09/123/10/12

Keywords

  • Angioplasty
  • Biomedical measurements
  • Catheters
  • Flexible electronics
  • Polymer films
  • Sensor Systems

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