Lithographic apparatus stage coupling

Jens de Goeij (Inventor), Ron de Bruijn (Inventor), J.P.M.B. Vermeulen (Inventor), René Leenaars (Inventor), Bas Jansen (Inventor)

Research output: PatentPatent publication

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Abstract

A coupling having a variable stiffness is disclosed. The coupling comprises: a deformable component and a support being movably arranged with respect to each other, wherein the deformable component comprises a viscoelastic material and wherein the support has a recess configured to receive the deformable component, wherein the deformable component is configured to deform in volumetric deformation when, in use, a force is applied to the deformable component, and wherein a shape of the deformable component and a shape of the support are configured such that the variable stiffness gradually increases as a function of an amount of the force. A stage apparatus may comprise the coupling.
Original languageEnglish
Patent numberWO2023078788
Priority date11/05/23
Publication statusPublished - 11 May 2023

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