Lithographic apparatus and device manufacturing method

P.C.M. Frissen (Inventor), J.C. Compter (Inventor), R. Tabor (Inventor)

Research output: PatentPatent publication

31 Downloads (Pure)

Abstract

A coil for use in an actuator in a lithographic projection apparatus. The coil is formed of a strip of electrically conducting sheet-material that is wound round a winding axis. Respective turns of the strip of sheet-material are separated by an electrically non-conducting layer
Original languageEnglish
Patent numberUS6891600
Publication statusPublished - 10 May 2005

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