Abstract
High performance motion systems in the semiconductor industry can achieve higher tracking accuracy when the structural dynamics of the system are taken into account. This work proposes an LTV feedforward control scheme which is based on the approximation of the system dynamics at low frequencies. The plant approximation contains both the low frequency contribution and resonance dynamics of the dominant modes. As an example of a flexible structure, the damped Euler-Bernoulli beam is investigated with considering the stable inversion of the approximated plant for feedforward control design. The results show a remarkable increase in positioning accuracy of the system being the consequence of the presence of feedforward control forces even when the reference setpoint accelerations equal zero.
| Original language | English |
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| Title of host publication | European Control Conference 2020, ECC 2020 |
| Publisher | Institute of Electrical and Electronics Engineers |
| Pages | 1409-1414 |
| Number of pages | 6 |
| ISBN (Electronic) | 9783907144015 |
| Publication status | Published - 20 Jul 2020 |
| Event | 2020 European Control Conference, ECC 2020 - Saint Petersburg, Russian Federation Duration: 12 May 2020 → 15 May 2020 |
Conference
| Conference | 2020 European Control Conference, ECC 2020 |
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| Abbreviated title | ECC 2020 |
| Country/Territory | Russian Federation |
| City | Saint Petersburg |
| Period | 12/05/20 → 15/05/20 |
Funding
*This research has received funding from the European Unions Horizon 2020 research and innovation programme under the Marie Sklodowska-Curie grant agreement No. 765579 1 Fatemeh Sharifi is with the Faculty of Electrical Engineering, Mathematics and Computer Science, University of Twente, 7500 AE Enschede, The Netherlands [email protected] 2Hans Zwart is with the Faculty of Electrical Engineering, Mathematics and Computer Science, University of Twente, 7500 AE En-schede, The Netherlands, and Dynamics and Control group, Eindhoven University of Technology, 5612 AZ Eindhoven, The Netherlands [email protected], [email protected] 3Marcel Heertjes is with ASML, Mechatronic System Development, Veldhoven, The Netherlands, and Dynamics and Control group, Eindhoven University of Technology, 5612 AZ Eindhoven, The Netherlands [email protected], [email protected] 4Nikolaos Kontaras is with Dynamics and Control group, Eindhoven University of Technology, 5612 AZ Eindhoven, The Netherlands [email protected]
| Funders | Funder number |
|---|---|
| Marie Skłodowska‐Curie | |
| European Union's Horizon 2020 - Research and Innovation Framework Programme | 765579 |
| Eindhoven University of Technology |