Abstract
To deal with performance trade-offs in the control of motion systems, a method is developed for designing variable-gain feedback controllers. The idea is to select a piecewise affine controller structure and, subsequently, to find the nonlinear controller parameter values of this structure by data-driven performance optimization. Herein an ℌ 2 performance objective is minimized. As a result, variable-gain controllers are synthesized using techniques from the field of learning and optimization. The method is applied to a wafer stage simulation model.
Original language | English |
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Title of host publication | 2013 ACC conference |
Place of Publication | Piscataway |
Publisher | Institute of Electrical and Electronics Engineers |
Pages | 6685-6690 |
Number of pages | 6 |
ISBN (Electronic) | 978-1-4799-0178-4 |
ISBN (Print) | 978-1-4799-0177-7 |
DOIs | |
Publication status | Published - 2013 |
Event | 2013 American Control Conference (ACC 2013), June 17-19, 2013, Washington, DC, USA - Renaissance Washington, DC Downtown Hotel, Washington, DC, United States Duration: 17 Jun 2013 → 19 Jun 2013 http://acc2013.a2c2.org/ |
Conference
Conference | 2013 American Control Conference (ACC 2013), June 17-19, 2013, Washington, DC, USA |
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Abbreviated title | ACC 2013 |
Country/Territory | United States |
City | Washington, DC |
Period | 17/06/13 → 19/06/13 |
Internet address |