Laser shockwave cleaning of EUV reticles

N.A. Lammers; L. Scaccabarozzi; V.Y. Banine; J.J.A.M. Mullen, van der

Laser shockwave cleaning of EUV reticles

N.A. Lammers, L. Scaccabarozzi, V.Y. Banine, J.J.A.M. Mullen, van der

Research output: Contribution to conference › Poster

Original language	English
Publication status	Published - 2008

Bibliographical note

Poster presented at the International Symposium on Extreme Ultraviolet Lithography 2008 (2008 EUV Symposium), 28 September-1 October 2008, Lake Tahoe, USA

Cite this

@conference{f3312f56fd1c48a6b56c3672e272425a,

title = "Laser shockwave cleaning of EUV reticles",

author = "N.A. Lammers and L. Scaccabarozzi and V.Y. Banine and {Mullen, van der}, J.J.A.M.",

note = "Poster presented at the International Symposium on Extreme Ultraviolet Lithography 2008 (2008 EUV Symposium), 28 September-1 October 2008, Lake Tahoe, USA",

year = "2008",

language = "English",

}