Laser-particle interactions in an RF capacitively coupled dusty plasma

J.A.R. Remy; G. Dingemans; M. Sorokin; A.H.F.M. Baede; W.W. Stoffels; G.M.W. Kroesen

doi:10.1109/TPS.2005.844949

Laser-particle interactions in an RF capacitively coupled dusty plasma

J.A.R. Remy, G. Dingemans, M. Sorokin, A.H.F.M. Baede, W.W. Stoffels, G.M.W. Kroesen

Research output: Contribution to journal › Article › Academic › peer-review

Abstract

Laser diagnostic studies of capacitively coupled radio frequency discharges containing silane diluted in argon have received considerable attention in order to understand the dust particles' formation and behavior. The formation mechanism of those macroscopic particulates needs to be clarified to enhance the product control in the surface processing industry. Laser light is scattered from in situ formed particles and is used to track their formation and transport under different plasma conditions. The results show that optical scattering can provide valuable information on the particles' growth and behavior. It also proves to be a good process-monitoring tool.

Original language	English
Pages (from-to)	394-395
Journal	IEEE Transactions on Plasma Science
Volume	33
Issue number	2, Pt. 1
DOIs	https://doi.org/10.1109/TPS.2005.844949
Publication status	Published - 2005

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abstract = "Laser diagnostic studies of capacitively coupled radio frequency discharges containing silane diluted in argon have received considerable attention in order to understand the dust particles' formation and behavior. The formation mechanism of those macroscopic particulates needs to be clarified to enhance the product control in the surface processing industry. Laser light is scattered from in situ formed particles and is used to track their formation and transport under different plasma conditions. The results show that optical scattering can provide valuable information on the particles' growth and behavior. It also proves to be a good process-monitoring tool.",

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AU - Remy, J.A.R.

AU - Dingemans, G.

AU - Sorokin, M.

AU - Baede, A.H.F.M.

AU - Stoffels, W.W.

AU - Kroesen, G.M.W.

PY - 2005

Y1 - 2005

N2 - Laser diagnostic studies of capacitively coupled radio frequency discharges containing silane diluted in argon have received considerable attention in order to understand the dust particles' formation and behavior. The formation mechanism of those macroscopic particulates needs to be clarified to enhance the product control in the surface processing industry. Laser light is scattered from in situ formed particles and is used to track their formation and transport under different plasma conditions. The results show that optical scattering can provide valuable information on the particles' growth and behavior. It also proves to be a good process-monitoring tool.

AB - Laser diagnostic studies of capacitively coupled radio frequency discharges containing silane diluted in argon have received considerable attention in order to understand the dust particles' formation and behavior. The formation mechanism of those macroscopic particulates needs to be clarified to enhance the product control in the surface processing industry. Laser light is scattered from in situ formed particles and is used to track their formation and transport under different plasma conditions. The results show that optical scattering can provide valuable information on the particles' growth and behavior. It also proves to be a good process-monitoring tool.

U2 - 10.1109/TPS.2005.844949

DO - 10.1109/TPS.2005.844949

M3 - Article

SN - 0093-3813

VL - 33

SP - 394

EP - 395

JO - IEEE Transactions on Plasma Science

JF - IEEE Transactions on Plasma Science

IS - 2, Pt. 1

ER -

Laser-particle interactions in an RF capacitively coupled dusty plasma

Abstract

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