Laser interferometer measurements on a six-Degree-of-Freedom controlled moving-magnet planar actuator

J. Achterberg; J.M.M. Rovers; C.M.M. Lierop, van; J.W. Jansen

Laser interferometer measurements on a six-Degree-of-Freedom controlled moving-magnet planar actuator

J. Achterberg, J.M.M. Rovers, C.M.M. Lierop, van, J.W. Jansen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	English
Title of host publication	Proceedings of the Eighth International Symposium on Linear Drives for Industry Applications (LDIA11), 3-6 July 2011, Eindhoven, The Netherlands
Publication status	Published - 2011

Cite this

@inproceedings{8e210ea8e44e4fbc80f3940bd3655a20,

title = "Laser interferometer measurements on a six-Degree-of-Freedom controlled moving-magnet planar actuator",

author = "J. Achterberg and J.M.M. Rovers and \{Lierop, van\}, C.M.M. and J.W. Jansen",

year = "2011",

language = "English",

booktitle = "Proceedings of the Eighth International Symposium on Linear Drives for Industry Applications (LDIA11), 3-6 July 2011, Eindhoven, The Netherlands",

}

Laser interferometer measurements on a six-Degree-of-Freedom controlled moving-magnet planar actuator. / Achterberg, J.; Rovers, J.M.M.; Lierop, van, C.M.M. et al.
Proceedings of the Eighth International Symposium on Linear Drives for Industry Applications (LDIA11), 3-6 July 2011, Eindhoven, The Netherlands. 2011.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Laser interferometer measurements on a six-Degree-of-Freedom controlled moving-magnet planar actuator

AU - Achterberg, J.

AU - Rovers, J.M.M.

AU - Lierop, van, C.M.M.

AU - Jansen, J.W.

PY - 2011

Y1 - 2011

M3 - Conference contribution

BT - Proceedings of the Eighth International Symposium on Linear Drives for Industry Applications (LDIA11), 3-6 July 2011, Eindhoven, The Netherlands

ER -