Laser interferometer measurements on a six-Degree-of-Freedom controlled moving-magnet planar actuator

J. Achterberg, J.M.M. Rovers, C.M.M. Lierop, van, J.W. Jansen

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageEnglish
Title of host publicationProceedings of the Eighth International Symposium on Linear Drives for Industry Applications (LDIA11), 3-6 July 2011, Eindhoven, The Netherlands
Publication statusPublished - 2011

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