Abstract
Pulsed and continuous ion beams are used in applications, such as focused ion beams.
The smallest achievable spot size in focused ion beam technology is limited by the
monochromaticity of the ion source. Here we present energy spread measurements on a
new concept, the ultra-cold ion source, which is based on near-threshold ionization of laser
cooled atoms [1]. The low energy spread is important for focused ion beam technology
because it enables milling and ion-beam-induced deposition at sub-nm length scales with
many ionic species, both light and heavy.
In the experiment, Rubidium atoms are captured in a magneto optical trap (MOT) inside
an accelerator structure where they are ionized by a pulsed laser in a DC electric field.
Time-of-flight measurements show two orders of magnitude lower energy spread than in
the current industry standard reached with Gallium liquid-metal ion sources. Bunches with
energy of only 5 eV are routinely produced with a root-mean-square energy spread as low
as 0.02 eV. This proves the feasibility of this new ion source concept [2].
In addition, we show that the slowly moving, low-energy-spread ion bunches are ideal
for studying intricate space charge effects in pulsed beams, i.e. the transition from space
charge dominated dynamics to ballistic motion.
Original language | English |
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Title of host publication | 21th Symposium Plasma Physics and Radiation Technology, Lunteren, The Netherlands, 3 and 4 March, 2009 |
Place of Publication | Lunteren, The Netherlands |
Publication status | Published - 2009 |
Event | 21st NNV Symposium on Plasma Physics and Radiation Technology - De Werelt, Lunteren, Netherlands Duration: 3 Mar 2009 → 4 Mar 2009 https://www.tue.nl/fileadmin/content/faculteiten/tn/PMP/Research/Conferences___Workshops/21st_NNV_symposium.pdf |
Conference
Conference | 21st NNV Symposium on Plasma Physics and Radiation Technology |
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Country/Territory | Netherlands |
City | Lunteren |
Period | 3/03/09 → 4/03/09 |
Other | |
Internet address |