@inproceedings{451865bb62b24f5e9ac1f5acfe2b7172,
title = "Laser-assisted growth of carbon nanotubes on laser-patterned substrates and inside sealed micro-channels",
abstract = "Carbon nanotube assemblies can be used for specific applications such as sensors and filters. We present a method and proof-of-concept to directly grow vertically-aligned carbon nanotube structures within sealed enclosures by means of a feedback-controlled laser-assisted chemical vapor deposition technique. The process is compatible with a variety of micro-fabrication processes and bypasses the need for post-process packaging. To further investigate the possibilities of small CNT structures we present a femtosecond laser patterning method. This laser is used to pattern either the catalyst before CNT growth, modifying the surface and catalytic conditions, or the CNT structures directly after growth.",
keywords = "Carbon nanotubes, Femtosecond laser, Laser-assisted CVD, Micro-channel, Patterning",
author = "{van de Burgt}, Y. and Y. Bellouard",
year = "2014",
month = jan,
day = "1",
doi = "10.1117/12.2044774",
language = "English",
isbn = "9780819498823",
series = "Proceedings of SPIE",
publisher = "SPIE",
booktitle = "Synthesis and Photonics of Nanoscale Materials XI",
address = "United States",
note = "Synthesis and Photonics of Nanoscale Materials XI ; Conference date: 02-02-2014 Through 04-02-2014",
}