Laser-assisted growth of carbon nanotubes on laser-patterned substrates and inside sealed micro-channels

Y. van de Burgt; Y. Bellouard

doi:10.1117/12.2044774

Laser-assisted growth of carbon nanotubes on laser-patterned substrates and inside sealed micro-channels

Y. van de Burgt, Y. Bellouard

Microsystems

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Abstract

Carbon nanotube assemblies can be used for specific applications such as sensors and filters. We present a method and proof-of-concept to directly grow vertically-aligned carbon nanotube structures within sealed enclosures by means of a feedback-controlled laser-assisted chemical vapor deposition technique. The process is compatible with a variety of micro-fabrication processes and bypasses the need for post-process packaging. To further investigate the possibilities of small CNT structures we present a femtosecond laser patterning method. This laser is used to pattern either the catalyst before CNT growth, modifying the surface and catalytic conditions, or the CNT structures directly after growth.

Original language	English
Title of host publication	Synthesis and Photonics of Nanoscale Materials XI
Publisher	SPIE
Number of pages	9
ISBN (Print)	9780819498823
DOIs	https://doi.org/10.1117/12.2044774
Publication status	Published - 1 Jan 2014
Event	Synthesis and Photonics of Nanoscale Materials XI - San Francisco, CA, United States Duration: 2 Feb 2014 → 4 Feb 2014

Publication series

Name	Proceedings of SPIE
Volume	8969

Conference

Conference	Synthesis and Photonics of Nanoscale Materials XI
Country	United States
City	San Francisco, CA
Period	2/02/14 → 4/02/14

Keywords

Carbon nanotubes
Femtosecond laser
Laser-assisted CVD
Micro-channel
Patterning

Access to Document

10.1117/12.2044774

Link to publication in Scopus

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Cite this

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title = "Laser-assisted growth of carbon nanotubes on laser-patterned substrates and inside sealed micro-channels",

abstract = "Carbon nanotube assemblies can be used for specific applications such as sensors and filters. We present a method and proof-of-concept to directly grow vertically-aligned carbon nanotube structures within sealed enclosures by means of a feedback-controlled laser-assisted chemical vapor deposition technique. The process is compatible with a variety of micro-fabrication processes and bypasses the need for post-process packaging. To further investigate the possibilities of small CNT structures we present a femtosecond laser patterning method. This laser is used to pattern either the catalyst before CNT growth, modifying the surface and catalytic conditions, or the CNT structures directly after growth.",

keywords = "Carbon nanotubes, Femtosecond laser, Laser-assisted CVD, Micro-channel, Patterning",

author = "{van de Burgt}, Y. and Y. Bellouard",

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doi = "10.1117/12.2044774",

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note = "Synthesis and Photonics of Nanoscale Materials XI ; Conference date: 02-02-2014 Through 04-02-2014",

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van de Burgt, Y & Bellouard, Y 2014, Laser-assisted growth of carbon nanotubes on laser-patterned substrates and inside sealed micro-channels. in Synthesis and Photonics of Nanoscale Materials XI., 896903, Proceedings of SPIE, vol. 8969, SPIE, Synthesis and Photonics of Nanoscale Materials XI, San Francisco, CA, United States, 2/02/14. https://doi.org/10.1117/12.2044774

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N2 - Carbon nanotube assemblies can be used for specific applications such as sensors and filters. We present a method and proof-of-concept to directly grow vertically-aligned carbon nanotube structures within sealed enclosures by means of a feedback-controlled laser-assisted chemical vapor deposition technique. The process is compatible with a variety of micro-fabrication processes and bypasses the need for post-process packaging. To further investigate the possibilities of small CNT structures we present a femtosecond laser patterning method. This laser is used to pattern either the catalyst before CNT growth, modifying the surface and catalytic conditions, or the CNT structures directly after growth.

AB - Carbon nanotube assemblies can be used for specific applications such as sensors and filters. We present a method and proof-of-concept to directly grow vertically-aligned carbon nanotube structures within sealed enclosures by means of a feedback-controlled laser-assisted chemical vapor deposition technique. The process is compatible with a variety of micro-fabrication processes and bypasses the need for post-process packaging. To further investigate the possibilities of small CNT structures we present a femtosecond laser patterning method. This laser is used to pattern either the catalyst before CNT growth, modifying the surface and catalytic conditions, or the CNT structures directly after growth.

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