Laser-assisted growth of carbon nanotubes on laser-patterned substrates and inside sealed micro-channels

Y. van de Burgt, Y. Bellouard

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Abstract

Carbon nanotube assemblies can be used for specific applications such as sensors and filters. We present a method and proof-of-concept to directly grow vertically-aligned carbon nanotube structures within sealed enclosures by means of a feedback-controlled laser-assisted chemical vapor deposition technique. The process is compatible with a variety of micro-fabrication processes and bypasses the need for post-process packaging. To further investigate the possibilities of small CNT structures we present a femtosecond laser patterning method. This laser is used to pattern either the catalyst before CNT growth, modifying the surface and catalytic conditions, or the CNT structures directly after growth.

Original languageEnglish
Title of host publicationSynthesis and Photonics of Nanoscale Materials XI
PublisherSPIE
Number of pages9
ISBN (Print)9780819498823
DOIs
Publication statusPublished - 1 Jan 2014
EventSynthesis and Photonics of Nanoscale Materials XI - San Francisco, CA, United States
Duration: 2 Feb 20144 Feb 2014

Publication series

NameProceedings of SPIE
Volume8969

Conference

ConferenceSynthesis and Photonics of Nanoscale Materials XI
CountryUnited States
CitySan Francisco, CA
Period2/02/144/02/14

Keywords

  • Carbon nanotubes
  • Femtosecond laser
  • Laser-assisted CVD
  • Micro-channel
  • Patterning

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