Large positive silicon ion clusters in a remote silane plasma

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Original language	English
Title of host publication	AVS, American Vacuum Society : 45th international symposium, Baltimore, November 2-6, 1998 : Abstracts
Pages	194
Publication status	Published - 1998

Cite this

@inproceedings{5ba83a650aa642b587c2b07cde97ccde,

title = "Large positive silicon ion clusters in a remote silane plasma",

author = "W.M.M. Kessels and C.M. Leewis and {Sanden, van de}, M.C.M. and D.C. Schram",

year = "1998",

language = "English",

pages = "194",

booktitle = "AVS, American Vacuum Society : 45th international symposium, Baltimore, November 2-6, 1998 : Abstracts",

}