Original language | English |
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Title of host publication | AVS, American Vacuum Society : 45th international symposium, Baltimore, November 2-6, 1998 : Abstracts |
Pages | 194 |
Publication status | Published - 1998 |
Large positive silicon ion clusters in a remote silane plasma
W.M.M. Kessels, C.M. Leewis, M.C.M. Sanden, van de, D.C. Schram
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic