Large positive silicon ion clusters in a remote silane plasma

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Original languageEnglish
Title of host publicationAVS, American Vacuum Society : 45th international symposium, Baltimore, November 2-6, 1998 : Abstracts
Pages194
Publication statusPublished - 1998

Cite this

Kessels, W. M. M., Leewis, C. M., Sanden, van de, M. C. M., & Schram, D. C. (1998). Large positive silicon ion clusters in a remote silane plasma. In AVS, American Vacuum Society : 45th international symposium, Baltimore, November 2-6, 1998 : Abstracts (pp. 194)