Large-area processing of solution type metal-oxide in TFT backplanes and integration in highly stable OLED displays

Marko Marinkovic, Ryo Takata, Anita Neumann, Duy Vu Pham, Ralf Anselmann, Joris Maas, Jan Laurens Van Der Steen, Gerwin Gelinck, Ilias Katsouras

Research output: Contribution to journalConference articleAcademicpeer-review

11 Citations (Scopus)
143 Downloads (Pure)

Abstract

Solution type metal-oxide semiconductor was processed on mass-production ready equipment and integrated in a backplane with ESL architecture TFTs. Excellent thickness uniformity of the semiconductor layer was obtained over the complete Gen I glass substrate (320 mm ×00D7; 352 mm), resulting in homogeneous TFT performance and bias stress reliability. An 8Sypi QVGA AMOLED display is demonstrated.

Original languageEnglish
Pages (from-to)169-172
Number of pages4
JournalSID International Symposium : Digest of Technical Papers
Volume48
Issue number1
DOIs
Publication statusPublished - 1 Jan 2017
Event2017 SID Symposium, Seminar, and Exhibition - Los Angeles, United States
Duration: 21 May 201726 May 2017
http://www.displayweek.org/2017.aspx

Keywords

  • Active-matrix OLED displays
  • Large-area processing
  • Soluble metal-oxide semiconductor

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