Large-area processing of solution type metal-oxide in TFT backplanes and integration in highly stable OLED displays

Marko Marinkovic; Ryo Takata; Anita Neumann; Duy Vu Pham; Ralf Anselmann; Joris Maas; Jan Laurens Van Der Steen; Gerwin Gelinck; Ilias Katsouras

doi:10.1002/sdtp.11612

Large-area processing of solution type metal-oxide in TFT backplanes and integration in highly stable OLED displays

Marko Marinkovic, Ryo Takata, Anita Neumann, Duy Vu Pham, Ralf Anselmann, Joris Maas, Jan Laurens Van Der Steen, Gerwin Gelinck, Ilias Katsouras

Molecular Materials and Nanosystems

Research output: Contribution to journal › Conference article › peer-review

13 Citations (Scopus)

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Abstract

Solution type metal-oxide semiconductor was processed on mass-production ready equipment and integrated in a backplane with ESL architecture TFTs. Excellent thickness uniformity of the semiconductor layer was obtained over the complete Gen I glass substrate (320 mm ×00D7; 352 mm), resulting in homogeneous TFT performance and bias stress reliability. An 8Sypi QVGA AMOLED display is demonstrated.

Original language	English
Pages (from-to)	169-172
Number of pages	4
Journal	SID International Symposium : Digest of Technical Papers
Volume	48
Issue number	1
DOIs	https://doi.org/10.1002/sdtp.11612
Publication status	Published - 1 Jan 2017
Event	2017 SID Symposium, Seminar, and Exhibition - Los Angeles, United States Duration: 21 May 2017 → 26 May 2017 http://www.displayweek.org/2017.aspx

Keywords

Active-matrix OLED displays
Large-area processing
Soluble metal-oxide semiconductor

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10.1002/sdtp.11612

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abstract = "Solution type metal-oxide semiconductor was processed on mass-production ready equipment and integrated in a backplane with ESL architecture TFTs. Excellent thickness uniformity of the semiconductor layer was obtained over the complete Gen I glass substrate (320 mm ×00D7; 352 mm), resulting in homogeneous TFT performance and bias stress reliability. An 8Sypi QVGA AMOLED display is demonstrated.",

keywords = "Active-matrix OLED displays, Large-area processing, Soluble metal-oxide semiconductor",

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AU - Marinkovic, Marko

AU - Takata, Ryo

AU - Neumann, Anita

AU - Pham, Duy Vu

AU - Anselmann, Ralf

AU - Maas, Joris

AU - Van Der Steen, Jan Laurens

AU - Gelinck, Gerwin

AU - Katsouras, Ilias

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KW - Active-matrix OLED displays

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KW - Soluble metal-oxide semiconductor

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Large-area processing of solution type metal-oxide in TFT backplanes and integration in highly stable OLED displays

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Keywords

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