Kinetic study of the chemical vapor deposition of tin oxidereactor design, "Coatings on Glass 1998"

A.M.B. Mol, van; G.R. Alcott; M.H.J.M. Croon, de; C.I.M.A. Spee; J.C. Schouten

Kinetic study of the chemical vapor deposition of tin oxidereactor design, "Coatings on Glass 1998"

A.M.B. Mol, van
, G.R. Alcott
, M.H.J.M. Croon, de
, C.I.M.A. Spee
, J.C. Schouten

Plasma & Materials Processing

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Abstract

Chem. Vapor Deposition is the result of a complicated interplay between gas phase chem., surface chem., and fluid dynamics of the reactor system. To improve in-line process control of an industrial deposition process, knowledge of all three phenomena is necessary. To study the intrinsic gas phase and surface kinetics of such a process at atm. pressure, a continuously stirred tank reactor has been designed. Gas phase kinetics is detd. using in situ Fourier transform IR spectroscopy and mass spectroscopy, whereas deposition rates are measured in situ with a microbalance. The present objective is a kinetic study of the intrinsic gas phase and surface chem. of the atm. pressure chem. vapor deposition of SnO2 layers on glass.

Original language	English
Title of host publication	Selected papers from the 2nd International Conference on Coatings on Glass (ICCG) : Convention Center, Saarbrücken, Germany, September 6 - 10, 1998 ; [high-performance coatings for transparent systems in large-area and/or high-volume applications]
Editors	H. Pulker, H. Schmidt, M.A. Aegerter
Place of Publication	Amsterdam
Publisher	Elsevier
Pages	178-180
Publication status	Published - 1999
Event	conference; International Conference on Coatings on Glass (ICCG) ; 2 (Saarbrücken) : 1998.09.06-10; 1998-09-06; 1998-09-09 - Duration: 6 Sept 1998 → 9 Sept 1998

Conference

Conference	conference; International Conference on Coatings on Glass (ICCG) ; 2 (Saarbrücken) : 1998.09.06-10; 1998-09-06; 1998-09-09
Period	6/09/98 → 9/09/98
Other	International Conference on Coatings on Glass (ICCG) ; 2 (Saarbrücken) : 1998.09.06-10

Cite this

Mol, van, A. M. B., Alcott, G. R., Croon, de, M. H. J. M., Spee, C. I. M. A., & Schouten, J. C. (1999). Kinetic study of the chemical vapor deposition of tin oxidereactor design, "Coatings on Glass 1998". In H. Pulker, H. Schmidt, & M. A. Aegerter (Eds.), Selected papers from the 2nd International Conference on Coatings on Glass (ICCG) : Convention Center, Saarbrücken, Germany, September 6 - 10, 1998 ; [high-performance coatings for transparent systems in large-area and/or high-volume applications] (pp. 178-180). Elsevier.

Mol, van, A.M.B. ; Alcott, G.R. ; Croon, de, M.H.J.M. et al. / Kinetic study of the chemical vapor deposition of tin oxidereactor design, "Coatings on Glass 1998". Selected papers from the 2nd International Conference on Coatings on Glass (ICCG) : Convention Center, Saarbrücken, Germany, September 6 - 10, 1998 ; [high-performance coatings for transparent systems in large-area and/or high-volume applications]. editor / H. Pulker ; H. Schmidt ; M.A. Aegerter. Amsterdam : Elsevier, 1999. pp. 178-180

@inproceedings{e05b26f6165c4e5ab50546bed2f6cdf3,

title = "Kinetic study of the chemical vapor deposition of tin oxidereactor design, {"}Coatings on Glass 1998{"}",

abstract = "Chem. Vapor Deposition is the result of a complicated interplay between gas phase chem., surface chem., and fluid dynamics of the reactor system. To improve in-line process control of an industrial deposition process, knowledge of all three phenomena is necessary. To study the intrinsic gas phase and surface kinetics of such a process at atm. pressure, a continuously stirred tank reactor has been designed. Gas phase kinetics is detd. using in situ Fourier transform IR spectroscopy and mass spectroscopy, whereas deposition rates are measured in situ with a microbalance. The present objective is a kinetic study of the intrinsic gas phase and surface chem. of the atm. pressure chem. vapor deposition of SnO2 layers on glass.",

author = "\{Mol, van\}, A.M.B. and G.R. Alcott and \{Croon, de\}, M.H.J.M. and C.I.M.A. Spee and J.C. Schouten",

year = "1999",

language = "English",

pages = "178--180",

editor = "H. Pulker and H. Schmidt and M.A. Aegerter",

booktitle = "Selected papers from the 2nd International Conference on Coatings on Glass (ICCG) : Convention Center, Saarbr{\"u}cken, Germany, September 6 - 10, 1998 ; [high-performance coatings for transparent systems in large-area and/or high-volume applications]",

publisher = "Elsevier",

address = "Netherlands",

note = "conference; International Conference on Coatings on Glass (ICCG) ; 2 (Saarbr{\"u}cken) : 1998.09.06-10; 1998-09-06; 1998-09-09 ; Conference date: 06-09-1998 Through 09-09-1998",

}

Mol, van, AMB, Alcott, GR, Croon, de, MHJM, Spee, CIMA & Schouten, JC 1999, Kinetic study of the chemical vapor deposition of tin oxidereactor design, "Coatings on Glass 1998". in H Pulker, H Schmidt & MA Aegerter (eds), Selected papers from the 2nd International Conference on Coatings on Glass (ICCG) : Convention Center, Saarbrücken, Germany, September 6 - 10, 1998 ; [high-performance coatings for transparent systems in large-area and/or high-volume applications]. Elsevier, Amsterdam, pp. 178-180, conference; International Conference on Coatings on Glass (ICCG) ; 2 (Saarbrücken) : 1998.09.06-10; 1998-09-06; 1998-09-09, 6/09/98.

Kinetic study of the chemical vapor deposition of tin oxidereactor design, "Coatings on Glass 1998". / Mol, van, A.M.B.; Alcott, G.R.; Croon, de, M.H.J.M. et al.
Selected papers from the 2nd International Conference on Coatings on Glass (ICCG) : Convention Center, Saarbrücken, Germany, September 6 - 10, 1998 ; [high-performance coatings for transparent systems in large-area and/or high-volume applications]. ed. / H. Pulker; H. Schmidt; M.A. Aegerter. Amsterdam: Elsevier, 1999. p. 178-180.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Kinetic study of the chemical vapor deposition of tin oxidereactor design, "Coatings on Glass 1998"

AU - Mol, van, A.M.B.

AU - Alcott, G.R.

AU - Croon, de, M.H.J.M.

AU - Spee, C.I.M.A.

AU - Schouten, J.C.

PY - 1999

Y1 - 1999

N2 - Chem. Vapor Deposition is the result of a complicated interplay between gas phase chem., surface chem., and fluid dynamics of the reactor system. To improve in-line process control of an industrial deposition process, knowledge of all three phenomena is necessary. To study the intrinsic gas phase and surface kinetics of such a process at atm. pressure, a continuously stirred tank reactor has been designed. Gas phase kinetics is detd. using in situ Fourier transform IR spectroscopy and mass spectroscopy, whereas deposition rates are measured in situ with a microbalance. The present objective is a kinetic study of the intrinsic gas phase and surface chem. of the atm. pressure chem. vapor deposition of SnO2 layers on glass.

AB - Chem. Vapor Deposition is the result of a complicated interplay between gas phase chem., surface chem., and fluid dynamics of the reactor system. To improve in-line process control of an industrial deposition process, knowledge of all three phenomena is necessary. To study the intrinsic gas phase and surface kinetics of such a process at atm. pressure, a continuously stirred tank reactor has been designed. Gas phase kinetics is detd. using in situ Fourier transform IR spectroscopy and mass spectroscopy, whereas deposition rates are measured in situ with a microbalance. The present objective is a kinetic study of the intrinsic gas phase and surface chem. of the atm. pressure chem. vapor deposition of SnO2 layers on glass.

M3 - Conference contribution

SP - 178

EP - 180

BT - Selected papers from the 2nd International Conference on Coatings on Glass (ICCG) : Convention Center, Saarbrücken, Germany, September 6 - 10, 1998 ; [high-performance coatings for transparent systems in large-area and/or high-volume applications]

A2 - Pulker, H.

A2 - Schmidt, H.

A2 - Aegerter, M.A.

PB - Elsevier

CY - Amsterdam

T2 - conference; International Conference on Coatings on Glass (ICCG) ; 2 (Saarbrücken) : 1998.09.06-10; 1998-09-06; 1998-09-09

Y2 - 6 September 1998 through 9 September 1998

ER -

Mol, van AMB, Alcott GR, Croon, de MHJM, Spee CIMA, Schouten JC. Kinetic study of the chemical vapor deposition of tin oxidereactor design, "Coatings on Glass 1998". In Pulker H, Schmidt H, Aegerter MA, editors, Selected papers from the 2nd International Conference on Coatings on Glass (ICCG) : Convention Center, Saarbrücken, Germany, September 6 - 10, 1998 ; [high-performance coatings for transparent systems in large-area and/or high-volume applications]. Amsterdam: Elsevier. 1999. p. 178-180

Kinetic study of the chemical vapor deposition of tin oxidereactor design, "Coatings on Glass 1998"

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