Iterative feedforward control with application to a wafer stage

L.L.G. Blanken, F.A.J. Boeren, D.J.H. Bruijnen, T.A.E. Oomen

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

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Abstract

abstract only
Original languageEnglish
Title of host publication34th Benelux Meeting on Systems and Control, March 24-26, 2015, Lommel, Belgium
Pages112
Publication statusPublished - 2015
Event34th Benelux Meeting on Systems and Control, March 24-26, 2015, Lommel, Belgium - Center Parcs "De Vossemeren", Lommel, Belgium
Duration: 24 Mar 201526 Mar 2015
http://www.beneluxmeeting.nl/2015/

Conference

Conference34th Benelux Meeting on Systems and Control, March 24-26, 2015, Lommel, Belgium
CountryBelgium
CityLommel
Period24/03/1526/03/15
Internet address

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