Iterative feedforward control with application to a wafer stage

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Abstract

abstract only

Original language	English
Title of host publication	34th Benelux Meeting on Systems and Control, March 24-26, 2015, Lommel, Belgium
Pages	112
Publication status	Published - 2015
Event	34th Benelux Meeting on Systems and Control, March 24-26, 2015, Lommel, Belgium - Center Parcs "De Vossemeren", Lommel, Belgium Duration: 24 Mar 2015 → 26 Mar 2015 http://www.beneluxmeeting.nl/2015/

Conference	34th Benelux Meeting on Systems and Control, March 24-26, 2015, Lommel, Belgium
Country/Territory	Belgium
City	Lommel
Period	24/03/15 → 26/03/15
Internet address	http://www.beneluxmeeting.nl/2015/

@inproceedings{d5c042b0b30b495f90901255feb4429b,

title = "Iterative feedforward control with application to a wafer stage",

abstract = "abstract only",

author = "L.L.G. Blanken and F.A.J. Boeren and D.J.H. Bruijnen and T.A.E. Oomen",

year = "2015",

language = "English",

pages = "112",

booktitle = "34th Benelux Meeting on Systems and Control, March 24-26, 2015, Lommel, Belgium",

note = "34th Benelux Meeting on Systems and Control, March 24-26, 2015, Lommel, Belgium ; Conference date: 24-03-2015 Through 26-03-2015",

url = "http://www.beneluxmeeting.nl/2015/",

}

TY - GEN

T1 - Iterative feedforward control with application to a wafer stage

AU - Blanken, L.L.G.

AU - Boeren, F.A.J.

AU - Bruijnen, D.J.H.

AU - Oomen, T.A.E.

PY - 2015

Y1 - 2015

N2 - abstract only

AB - abstract only

M3 - Conference contribution

SP - 112

BT - 34th Benelux Meeting on Systems and Control, March 24-26, 2015, Lommel, Belgium

T2 - 34th Benelux Meeting on Systems and Control, March 24-26, 2015, Lommel, Belgium

Y2 - 24 March 2015 through 26 March 2015

ER -