Iterative autofocus algorithms for scanning electron microscopy

M. Rudnaya, R.M.M. Mattheij, J.M.L. Maubach

Research output: Contribution to journalArticleAcademicpeer-review

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Introduction. A robust and reliable autofocus algorithm is important concern for the automation of a Scanning Electron Microscope (SEM). Comparison of existing autofocus techniques has been done for specific specimen for fluorescence [1] and non-fluorescence microscopy [2-3]. For Scanning Transmission Electron Microscopy some of available algorithms were compared [4]. To the authors’ knowledge broad evolution has not been published yet for SEM.
Original languageEnglish
Pages (from-to)1108-1109
JournalMicroscopy and Microanalysis
Issue numberSuppl.2
Publication statusPublished - 2009


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