IRLAS measurements on a silane plasma

M.M. Hemerik, G.M.W. Kroesen, F.J. Hoog, de

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageEnglish
Title of host publicationProc. Frontiers in Low Temperature Plasma Diagnostics II (Bad Honnef, Germany, 17-21 February 1997)
Pages153-154
Publication statusPublished - 1997

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