Ionisation efficiency in a pinched cascaded arc channel

K.T.A.L. Burm, W.J. Goedheer, J.J.A.M. Mullen, van der, D.C. Schram

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Abstract

In the present study, we will focus on the improvement of the ion density at the arc outlet. Efficiency increases are necessary to obtain effective remote deposition, in which the plasma source and target area are decomposed. Remote deposition is easier to control than non-remote deposition and therefore preferable. The increase in the ionisation outflow will be obtained by creating a nozzle shaped cylindrical arc channel. Simulations were used to obtain the results. The arc plasma expands supersonically into a low pressure vessel. To simulate the existence of the expansion, a Ma=0.9 boundary condition is implemented at the arc outlet
Original languageEnglish
Title of host publicationProceedings of the XXIII International Conference on Phenomena in Ionized Gases, ICPIG, 17-22 July 1997, Toulouse, France : Contributed Papers : Vol. II
EditorsM.C. Bordage, A. Gleizes
Place of PublicationLes Ulis
PublisherEDP Sciences
Pages108-109
ISBN (Print)2-86883-322-5
Publication statusPublished - 1997
Event23rd International Conference on Phenomena in Ionized Gases (ICPIG 1997) - Toulouse, France
Duration: 17 Jul 199722 Jul 1997

Conference

Conference23rd International Conference on Phenomena in Ionized Gases (ICPIG 1997)
Abbreviated titleICPIG 1997
Country/TerritoryFrance
CityToulouse
Period17/07/9722/07/97

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