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Ion Projection Surface Structuring with Noble Gas Ions at 75 keV

  • W.H. Bruenger
  • , A.H. Dietzel
  • , H. Loeschner

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original languageEnglish
Title of host publicationInt. Conference on Surface Modification of Materials Micro Manufacture
Place of PublicationTurkey, Kusadasi
PagesSeptember 4-9 2005
Publication statusPublished - 2005

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