Original language | English |
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Title of host publication | Int. Conference on Surface Modification of Materials Micro Manufacture |
Place of Publication | Turkey, Kusadasi |
Pages | September 4-9 2005 |
Publication status | Published - 2005 |
Ion Projection Surface Structuring with Noble Gas Ions at 75 keV
W.H. Bruenger, A.H. Dietzel, H. Loeschner
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review