Ion Projection Surface Structuring with Noble Gas Ions at 75 keV

W.H. Bruenger, A.H. Dietzel, H. Loeschner

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageEnglish
Title of host publicationInt. Conference on Surface Modification of Materials Micro Manufacture
Place of PublicationTurkey, Kusadasi
PagesSeptember 4-9 2005
Publication statusPublished - 2005

Cite this

Bruenger, W. H., Dietzel, A. H., & Loeschner, H. (2005). Ion Projection Surface Structuring with Noble Gas Ions at 75 keV. In Int. Conference on Surface Modification of Materials Micro Manufacture (pp. September 4-9 2005).