| Original language | English |
|---|---|
| Title of host publication | Int. Conference on Surface Modification of Materials Micro Manufacture |
| Place of Publication | Turkey, Kusadasi |
| Pages | September 4-9 2005 |
| Publication status | Published - 2005 |
Ion Projection Surface Structuring with Noble Gas Ions at 75 keV
W.H. Bruenger, A.H. Dietzel, H. Loeschner
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review