Ion-Projection Direct Structuring of Patterned Media

H. Loeschner; E. Platzgummer; G. Stengl; H. Buschbeck; E. Cekan; A. Chylik; E. Haugeneder; R. Kortner; A.H. Dietzel; R. Berger; H. Grimm; B.D. Terris; W.H. Bruenger; D. Adam; M. Boehm; H. Eichhorn; R. Springer; J. Butschke; F. Letzkus

Ion-Projection Direct Structuring of Patterned Media

H. Loeschner, E. Platzgummer, G. Stengl, H. Buschbeck, E. Cekan, A. Chylik, E. Haugeneder, R. Kortner, A.H. Dietzel, R. Berger, H. Grimm, B.D. Terris, W.H. Bruenger, D. Adam, M. Boehm, H. Eichhorn, R. Springer, J. Butschke, F. Letzkus

Microsystems

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	English
Title of host publication	MNE conference 2002
Place of Publication	Switzerland, Lugano
Publication status	Published - 2002

Cite this

@inproceedings{c2c9548f140e4c43b75110935f3901b1,

title = "Ion-Projection Direct Structuring of Patterned Media",

author = "H. Loeschner and E. Platzgummer and G. Stengl and H. Buschbeck and E. Cekan and A. Chylik and E. Haugeneder and R. Kortner and A.H. Dietzel and R. Berger and H. Grimm and B.D. Terris and W.H. Bruenger and D. Adam and M. Boehm and H. Eichhorn and R. Springer and J. Butschke and F. Letzkus",

year = "2002",

language = "English",

booktitle = "MNE conference 2002",

}

TY - GEN

T1 - Ion-Projection Direct Structuring of Patterned Media

AU - Loeschner, H.

AU - Platzgummer, E.

AU - Stengl, G.

AU - Buschbeck, H.

AU - Cekan, E.

AU - Chylik, A.

AU - Haugeneder, E.

AU - Kortner, R.

AU - Dietzel, A.H.

AU - Berger, R.

AU - Grimm, H.

AU - Terris, B.D.

AU - Bruenger, W.H.

AU - Adam, D.

AU - Boehm, M.

AU - Eichhorn, H.

AU - Springer, R.

AU - Butschke, J.

AU - Letzkus, F.

PY - 2002

Y1 - 2002

M3 - Conference contribution

BT - MNE conference 2002

CY - Switzerland, Lugano

ER -