Ion-Projection Direct-Structuring (IPDS) for Nanotechnology Applications

H. Loeschner, E.J. Fantner, R. Kortner, E. Platzgummer, G. Stengl, M. Zeininger, J.E.E. Baglin, R. Berger, W.H. Bruenger, A.H. Dietzel, M.I. Baraton, L. Merhari

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageEnglish
Title of host publicationMRS 2002 Fall Meeting, invited
Place of PublicationUnited States, Boston
Publication statusPublished - 2002

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