Ion fluxes towards surfaces exposed to EUV-induced plasmas

T.H.M. van de Ven

Research output: ThesisPhd Thesis 1 (Research TU/e / Graduation TU/e)

1909 Downloads (Pure)
Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • Applied Physics
Supervisors/Advisors
  • Banine, Vadim Y., Promotor
  • Kroesen, Gerrit M.W., Promotor
  • Beckers, Job, Copromotor
Award date4 Jul 2018
Place of PublicationEindhoven
Publisher
Print ISBNs978-90-386-4544-5
Publication statusPublished - 4 Jul 2018

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