Ion flux measurements in an Ar/NH3/SiH4-remote plasma using a pulse shaped double-side capacitive probe

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Original language	English
Title of host publication	14th international Conference on Plasma Physics and Applications, September 14-18, 2007, Brasov, Romania
Editors	B. Mitu, G. Dinescu
Pages	39-
Publication status	Published - 2007

Cite this

@inproceedings{de34399dd323453eb53d4bba6adb8048,

title = "Ion flux measurements in an Ar/NH3/SiH4-remote plasma using a pulse shaped double-side capacitive probe",

author = "M.C. Petcu and A.C. Bronneberg and M. Creatore and \{Sanden, van de\}, M.C.M.",

year = "2007",

language = "English",

pages = "39--",

editor = "B. Mitu and G. Dinescu",

booktitle = "14th international Conference on Plasma Physics and Applications, September 14-18, 2007, Brasov, Romania",

}

Ion flux measurements in an Ar/NH3/SiH4-remote plasma using a pulse shaped double-side capacitive probe. / Petcu, M.C.; Bronneberg, A.C.; Creatore, M. et al.
14th international Conference on Plasma Physics and Applications, September 14-18, 2007, Brasov, Romania. ed. / B. Mitu; G. Dinescu. 2007. p. 39-.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - Ion flux measurements in an Ar/NH3/SiH4-remote plasma using a pulse shaped double-side capacitive probe

AU - Petcu, M.C.

AU - Bronneberg, A.C.

AU - Creatore, M.

AU - Sanden, van de, M.C.M.

PY - 2007

Y1 - 2007

M3 - Conference contribution

SP - 39-

BT - 14th international Conference on Plasma Physics and Applications, September 14-18, 2007, Brasov, Romania

A2 - Mitu, B.

A2 - Dinescu, G.

ER -