Ion flux measurements in an Ar/NH3/SiH4-remote plasma using a pulse shaped double-side capacitive probe

M.C. Petcu, A.C. Bronneberg, M. Creatore, M.C.M. Sanden, van de

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Original languageEnglish
Title of host publication14th international Conference on Plasma Physics and Applications, September 14-18, 2007, Brasov, Romania
EditorsB. Mitu, G. Dinescu
Publication statusPublished - 2007

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