Ion flux measurements in an Ar/NH3/SiH4-remote plasma using a pulse shaped double-side capacitive probe

M.C. Petcu, A.C. Bronneberg, M. Creatore, M.C.M. Sanden, van de

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Original languageEnglish
Title of host publication14th international Conference on Plasma Physics and Applications, September 14-18, 2007, Brasov, Romania
EditorsB. Mitu, G. Dinescu
Pages39-
Publication statusPublished - 2007

Cite this

Petcu, M. C., Bronneberg, A. C., Creatore, M., & Sanden, van de, M. C. M. (2007). Ion flux measurements in an Ar/NH3/SiH4-remote plasma using a pulse shaped double-side capacitive probe. In B. Mitu, & G. Dinescu (Eds.), 14th international Conference on Plasma Physics and Applications, September 14-18, 2007, Brasov, Romania (pp. 39-)