Ion energy selection with pulse-shaped RF-bias

M.A. Blauw; A.H.M. Smets; M.C.M. Sanden, van de

Ion energy selection with pulse-shaped RF-bias

M.A. Blauw, A.H.M. Smets, M.C.M. Sanden, van de

Plasma & Materials Processing

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	English
Title of host publication	Proceedings of the 27th International Conference on Phenomena in Ionized Gases (ICPIG), 17-22 July 2005, Veldhoven, The Netherlands
Place of Publication	Veldhoven, The Netherlands
Pages	09-
Publication status	Published - 2005

Cite this

@inproceedings{85a3f9d0c0c4467c8af4164470c6bf1d,

title = "Ion energy selection with pulse-shaped RF-bias",

author = "M.A. Blauw and A.H.M. Smets and {Sanden, van de}, M.C.M.",

year = "2005",

language = "English",

pages = "09--",

booktitle = "Proceedings of the 27th International Conference on Phenomena in Ionized Gases (ICPIG), 17-22 July 2005, Veldhoven, The Netherlands",

}

Ion energy selection with pulse-shaped RF-bias. / Blauw, M.A.; Smets, A.H.M.; Sanden, van de, M.C.M.

Proceedings of the 27th International Conference on Phenomena in Ionized Gases (ICPIG), 17-22 July 2005, Veldhoven, The Netherlands. Veldhoven, The Netherlands, 2005. p. 09-.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review