Ion energy selection with pulse-shaped RF-bias

M.A. Blauw, A.H.M. Smets, M.C.M. Sanden, van de

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageEnglish
Title of host publicationProceedings of the 27th International Conference on Phenomena in Ionized Gases (ICPIG), 17-22 July 2005, Veldhoven, The Netherlands
Place of PublicationVeldhoven, The Netherlands
Publication statusPublished - 2005

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