Original language | English |
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Title of host publication | Proceedings of the 27th International Conference on Phenomena in Ionized Gases (ICPIG), 17-22 July 2005, Veldhoven, The Netherlands |
Place of Publication | Veldhoven, The Netherlands |
Pages | 09- |
Publication status | Published - 2005 |
Ion energy selection with pulse-shaped RF-bias
M.A. Blauw, A.H.M. Smets, M.C.M. Sanden, van de
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review