Ion energy modulation in an RF gas discharge

P.M. Vallinga, P.M. Meijer, H. Deutsch, F.J. de Hoog

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Original language	English
Title of host publication	ICPIG : International Conference on Phenomena in ionized gases, 18th, Swansea, 13-17 July, 1987
Place of Publication	Bristol
Publisher	Hilger
Pages	814-815
Volume	4
Publication status	Published - 1987
Event	18th International Conference on Phenomena in Ionized Gases (ICPIG XVIII) - Swansea, United Kingdom Duration: 13 Jul 1987 → 17 Jul 1987

Conference	18th International Conference on Phenomena in Ionized Gases (ICPIG XVIII)
Country/Territory	United Kingdom
City	Swansea
Period	13/07/87 → 17/07/87

Cite this

@inproceedings{98d0467032f84ee0ae714886cd672c1b,

title = "Ion energy modulation in an RF gas discharge",

author = "P.M. Vallinga and P.M. Meijer and H. Deutsch and {de Hoog}, F.J.",

year = "1987",

language = "English",

volume = "4",

pages = "814--815",

booktitle = "ICPIG : International Conference on Phenomena in ionized gases, 18th, Swansea, 13-17 July, 1987",

publisher = "Hilger",

note = "18th International Conference on Phenomena in Ionized Gases (ICPIG XVIII) ; Conference date: 13-07-1987 Through 17-07-1987",

}

TY - GEN

T1 - Ion energy modulation in an RF gas discharge

AU - Vallinga, P.M.

AU - Meijer, P.M.

AU - Deutsch, H.

AU - de Hoog, F.J.

PY - 1987

Y1 - 1987

M3 - Conference contribution

VL - 4

SP - 814

EP - 815

BT - ICPIG : International Conference on Phenomena in ionized gases, 18th, Swansea, 13-17 July, 1987

PB - Hilger

CY - Bristol

T2 - 18th International Conference on Phenomena in Ionized Gases (ICPIG XVIII)

Y2 - 13 July 1987 through 17 July 1987

ER -