Ion energy modulation in an RF gas discharge

P.M. Vallinga, P.M. Meijer, H. Deutsch, F.J. de Hoog

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Original languageEnglish
Title of host publicationICPIG : International Conference on Phenomena in ionized gases, 18th, Swansea, 13-17 July, 1987
Place of PublicationBristol
PublisherHilger
Pages814-815
Volume4
Publication statusPublished - 1987
Event18th International Conference on Phenomena in Ionized Gases (ICPIG XVIII) - Swansea, United Kingdom
Duration: 13 Jul 198717 Jul 1987

Conference

Conference18th International Conference on Phenomena in Ionized Gases (ICPIG XVIII)
CountryUnited Kingdom
CitySwansea
Period13/07/8717/07/87

Cite this

Vallinga, P. M., Meijer, P. M., Deutsch, H., & de Hoog, F. J. (1987). Ion energy modulation in an RF gas discharge. In ICPIG : International Conference on Phenomena in ionized gases, 18th, Swansea, 13-17 July, 1987 (Vol. 4, pp. 814-815). Bristol: Hilger.
Vallinga, P.M. ; Meijer, P.M. ; Deutsch, H. ; de Hoog, F.J. / Ion energy modulation in an RF gas discharge. ICPIG : International Conference on Phenomena in ionized gases, 18th, Swansea, 13-17 July, 1987. Vol. 4 Bristol : Hilger, 1987. pp. 814-815
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title = "Ion energy modulation in an RF gas discharge",
author = "P.M. Vallinga and P.M. Meijer and H. Deutsch and {de Hoog}, F.J.",
year = "1987",
language = "English",
volume = "4",
pages = "814--815",
booktitle = "ICPIG : International Conference on Phenomena in ionized gases, 18th, Swansea, 13-17 July, 1987",
publisher = "Hilger",

}

Vallinga, PM, Meijer, PM, Deutsch, H & de Hoog, FJ 1987, Ion energy modulation in an RF gas discharge. in ICPIG : International Conference on Phenomena in ionized gases, 18th, Swansea, 13-17 July, 1987. vol. 4, Hilger, Bristol, pp. 814-815, 18th International Conference on Phenomena in Ionized Gases (ICPIG XVIII), Swansea, United Kingdom, 13/07/87.

Ion energy modulation in an RF gas discharge. / Vallinga, P.M.; Meijer, P.M.; Deutsch, H.; de Hoog, F.J.

ICPIG : International Conference on Phenomena in ionized gases, 18th, Swansea, 13-17 July, 1987. Vol. 4 Bristol : Hilger, 1987. p. 814-815.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

TY - GEN

T1 - Ion energy modulation in an RF gas discharge

AU - Vallinga, P.M.

AU - Meijer, P.M.

AU - Deutsch, H.

AU - de Hoog, F.J.

PY - 1987

Y1 - 1987

M3 - Conference contribution

VL - 4

SP - 814

EP - 815

BT - ICPIG : International Conference on Phenomena in ionized gases, 18th, Swansea, 13-17 July, 1987

PB - Hilger

CY - Bristol

ER -

Vallinga PM, Meijer PM, Deutsch H, de Hoog FJ. Ion energy modulation in an RF gas discharge. In ICPIG : International Conference on Phenomena in ionized gases, 18th, Swansea, 13-17 July, 1987. Vol. 4. Bristol: Hilger. 1987. p. 814-815