Ion density distribution in an expanding thermal nitrogen plasma for plasma/surface interaction studies

G.J.H. Brussaard, A. Graaf, de, M.C.M. Sanden, van de, D.C. Schram

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

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Original language	English
Title of host publication	AVS, American Vacuum Society : 44th national symposium, San Jose, October 20-24, 1997 : Abstracts
Pages	73
Publication status	Published - 1997

Access to Document

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title = "Ion density distribution in an expanding thermal nitrogen plasma for plasma/surface interaction studies",

author = "G.J.H. Brussaard and {Graaf, de}, A. and {Sanden, van de}, M.C.M. and D.C. Schram",

year = "1997",

language = "English",

pages = "73",

booktitle = "AVS, American Vacuum Society : 44th national symposium, San Jose, October 20-24, 1997 : Abstracts",

}

Ion density distribution in an expanding thermal nitrogen plasma for plasma/surface interaction studies. / Brussaard, G.J.H.; Graaf, de, A.; Sanden, van de, M.C.M. et al.
AVS, American Vacuum Society : 44th national symposium, San Jose, October 20-24, 1997 : Abstracts. 1997. p. 73.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - Ion density distribution in an expanding thermal nitrogen plasma for plasma/surface interaction studies

AU - Brussaard, G.J.H.

AU - Graaf, de, A.

AU - Sanden, van de, M.C.M.

AU - Schram, D.C.

PY - 1997

Y1 - 1997

M3 - Conference contribution

SP - 73

BT - AVS, American Vacuum Society : 44th national symposium, San Jose, October 20-24, 1997 : Abstracts

ER -