Ion channeling for strain analysis in buried nanofilms (

L.J.M. Selen; F.J.J. Janssen; L.J. IJzendoorn, van; M.J.A. Voigt, de; M.J.J. Theunissen; P.J.M. Smulders; T.J. Eijkemans

Ion channeling for strain analysis in buried nanofilms (

L.J.M. Selen, F.J.J. Janssen, L.J. IJzendoorn, van, M.J.A. Voigt, de, M.J.J. Theunissen, P.J.M. Smulders, T.J. Eijkemans

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Abstract

The title should have been: \"Ion channeling for strain anal. in buried nanofilms (

Original language	English
Pages (from-to)	5507-5507
Journal	Journal of Applied Physics
Volume	91
Issue number	8
Publication status	Published - 2002

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@article{2adff66fbe0f4fcb9990404519cd9419,

title = "Ion channeling for strain analysis in buried nanofilms (",

abstract = "The title should have been: \{"}Ion channeling for strain anal. in buried nanofilms (",

author = "L.J.M. Selen and F.J.J. Janssen and {IJzendoorn, van}, L.J. and {Voigt, de}, M.J.A. and M.J.J. Theunissen and P.J.M. Smulders and T.J. Eijkemans",

year = "2002",

language = "English",

volume = "91",

pages = "5507--5507",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

number = "8",

}

TY - JOUR

T1 - Ion channeling for strain analysis in buried nanofilms (

AU - Selen, L.J.M.

AU - Janssen, F.J.J.

AU - IJzendoorn, van, L.J.

AU - Voigt, de, M.J.A.

AU - Theunissen, M.J.J.

AU - Smulders, P.J.M.

AU - Eijkemans, T.J.

PY - 2002

Y1 - 2002

N2 - The title should have been: \"Ion channeling for strain anal. in buried nanofilms (

AB - The title should have been: \"Ion channeling for strain anal. in buried nanofilms (

M3 - Article

SN - 0021-8979

VL - 91

SP - 5507

EP - 5507

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 8

ER -

Ion channeling for strain analysis in buried nanofilms (

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