Ion channeling for strain analysis in buried nanofilms (

L.J.M. Selen, F.J.J. Janssen, L.J. IJzendoorn, van, M.J.A. Voigt, de, M.J.J. Theunissen, P.J.M. Smulders, T.J. Eijkemans

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    Abstract

    The title should have been: \"Ion channeling for strain anal. in buried nanofilms (
    Original languageEnglish
    Pages (from-to)5507-5507
    JournalJournal of Applied Physics
    Volume91
    Issue number8
    Publication statusPublished - 2002

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