| Original language | English |
|---|---|
| Qualification | Doctor of Philosophy |
| Awarding Institution |
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| Supervisors/Advisors |
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| Award date | 12 Jun 1987 |
| Place of Publication | Eindhoven |
| Publisher | |
| DOIs | |
| Publication status | Published - 1987 |
Investigations on an RF-plasma related to plasma etching
T.H.J. Bisschops
Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e)
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