Investigations on an RF-plasma related to plasma etching

T.H.J. Bisschops

Research output: ThesisPhd Thesis 1 (Research TU/e / Graduation TU/e)

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Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • Applied Physics
Supervisors/Advisors
  • de Hoog, F.J., Promotor
  • Schram, Daan C., Promotor
Award date12 Jun 1987
Place of PublicationEindhoven
Publisher
DOIs
Publication statusPublished - 1987

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