Investigation of the subsonic beam behaviour of an expanding thermal plasma used to deposit silicondioxide like films

M.F.A.M. Hest, van, D.C. Schram, M.C.M. Sanden, van de

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Original languageEnglish
Title of host publicationAVS, American Vacuum Society : 47th international symposium, Boston, October 2-6, 2000 : virtual proceedings
Publication statusPublished - 2000

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