Investigation of the subsonic beam behaviour of an expanding thermal plasma used to deposit silicondioxide like films

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Original language	English
Title of host publication	AVS, American Vacuum Society : 47th international symposium, Boston, October 2-6, 2000 : virtual proceedings
Publication status	Published - 2000

Cite this

@inproceedings{f58a1e07959a4a1c8dca44ee3d5316ee,

title = "Investigation of the subsonic beam behaviour of an expanding thermal plasma used to deposit silicondioxide like films",

author = "{Hest, van}, M.F.A.M. and D.C. Schram and {Sanden, van de}, M.C.M.",

year = "2000",

language = "English",

booktitle = "AVS, American Vacuum Society : 47th international symposium, Boston, October 2-6, 2000 : virtual proceedings",

}

AVS, American Vacuum Society : 47th international symposium, Boston, October 2-6, 2000 : virtual proceedings. 2000. TF+EL-WeA10.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - Investigation of the subsonic beam behaviour of an expanding thermal plasma used to deposit silicondioxide like films

AU - Hest, van, M.F.A.M.

AU - Schram, D.C.

AU - Sanden, van de, M.C.M.

PY - 2000

Y1 - 2000

M3 - Conference contribution

BT - AVS, American Vacuum Society : 47th international symposium, Boston, October 2-6, 2000 : virtual proceedings

ER -